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SQUID structure preventing magnetic field interference in non-magnetic shielding environment

A device structure and magnetic shielding technology, which is applied in the manufacture/processing of devices containing a node of different materials, superconductor components, superconductor devices, etc., can solve the problems of high process difficulty and strict requirements of micromachining process

Active Publication Date: 2015-02-25
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

At present, Josephson junctions with a size of sub-micron scale have been prepared in the world, and the size of the Josephson junction has been reduced from the typical order of several microns to the sub-micron scale. The submicron Josephson junction developed by Leo et. et al. (N.De Leo, M.Fretto, A.Sosso, E.Enrico, L.Boarino, V.Lacquaniti, Sub-micron SNIS Josephson junctions for metrological application, Physics Procedia36( 2012), 105–109) have greatly improved its ability to resist magnetic field interference, but the micromachining process for preparing small-sized Josephson junctions requires strict requirements, such as high difficulty in pattern preparation and device etching, and the magnetic field The influence on small-sized junctions still exists, so the small-sized Josephson junction needs to be further improved in terms of magnetic field interference suppression

Method used

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  • SQUID structure preventing magnetic field interference in non-magnetic shielding environment
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  • SQUID structure preventing magnetic field interference in non-magnetic shielding environment

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Embodiment Construction

[0023] The design and fabrication process of the improved SQUID device are basically similar to the current SQUID design and fabrication except that a superconducting wall surrounding the Josephson junction is added at the positions of the two Josephson junctions.

[0024] First, design the SQUID device, and determine the structure and parameters of the SQUID device, such as size, critical current of Josephson junction, superconducting ring inductance and so on.

[0025]Design the SQUID device preparation process, and determine the micromachining process for each preparation step according to the SQUID device design, and design the mask for each step.

[0026] Using the mask plate, the SQUID device conforming to the design parameters was prepared according to the microfabrication process steps.

[0027] (1) First, a three-layer thin film of a superconductor-insulating layer-superconductor structure is prepared on a substrate.

[0028] (2) Afterwards, the superconducting ring ...

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Abstract

The invention relates to an SQUID structure preventing magnetic field interference in non-magnetic shielding environment. The structure is characterized in that an annular superconductive wall is manufactured around a Josephson junction, the superconductive wall surrounds the Josephson junction and achieves a micro magnetic shielding function, and accordingly interference of an imposed magnetic field on the Josephson junction is suppressed. The height of the superconductive wall is larger than the thickness of an insulating layer of the Josephson junction. The annular superconductive wall based on a superconductive film material is manufactured around the Josephson junction serving as the core structure of an SQUID, and the annular superconductive wall can effectively shield the imposed magnetic field from entering the Josephson junction, so that influences of the imposed magnetic field on the Josephson junction are effectively prevented, and stability of SQUID parameters is improved.

Description

technical field [0001] The invention relates to a structure of a SQUID device for suppressing magnetic field interference in a non-magnetic shielding environment, more precisely, it can effectively prevent the interference of external magnetic fields on the stability of SQUID sensor parameters. The invention belongs to the field of superconducting quantum interference device (SQUID). Background technique [0002] Superconducting quantum interference device (SQUID) is a superconducting quantum device based on the Josephson effect and flux quantization principles. Its basic structure is to insert two Josephson junctions in a superconducting ring. SQUID is currently the most Sensitive magnetic flux sensor, the magnetic flux noise of a typical SQUID device is in μΦ 0 / Hz 1 / 2 magnitude (1Φ 0 =2.07×10 -15 Wb), its magnetic field noise is at fT / Hz 1 / 2 Magnitude (1fT=1×10 -15 T), due to its extremely high sensitivity, SQUID devices have great application potential in biomagnet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/22H01L39/24H01L39/02H10N60/01H10N60/80
Inventor 刘全胜王会武应利良张国峰王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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