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Precise adjusting apparatus of reflector

A precision adjustment and mirror technology, applied in installation, optics, instruments, etc., can solve problems such as inability to meet high-precision adjustment and limit adjustment accuracy, and achieve the effect of avoiding transmission errors and improving adjustment accuracy

Active Publication Date: 2015-03-25
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the mirror rotates through the bearing, and the bearing itself has radial clearance, which limits its adjustment accuracy and cannot meet the high-precision adjustment application occasions. At present, the adjustment accuracy that this device can achieve is 50μrad when the arm length is 100mm.

Method used

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  • Precise adjusting apparatus of reflector
  • Precise adjusting apparatus of reflector
  • Precise adjusting apparatus of reflector

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0021] Such as figure 2 As shown, the mirror fine adjustment device of the present invention includes a base 3 for installing a mirror group 4 . The base 3 has an external interface for installation into the optical system, and incident and outgoing light through holes 3(a), 3(b). The base also connects linear motors 1 and 2.

[0022] Such as Figure 3-5 As shown, the base 3 is equipped with an adapter plate 18 for connecting the third mirror ring 17, and the three are fastened into one body by screws. The third mirror ring 17 is connected to the second mirror ring 16 through the spring assembly 10 , 12 , and the connection is an elastic connection. The second mirror ring 16 can rotate around the Y axis relative to the third mirror ring 17 . The second mirror ring 16 is connected to the first mirror ring 15 through the spring assembly 11 ...

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PUM

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Abstract

The invention provides a precise adjusting apparatus of a reflector. The precise adjusting apparatus arranged at an optical system lens seat is characterized in that the precise adjusting apparatus comprises a lens ring, a second lens ring, and a third lens ring. The first lens ring and the second lens ring are connected by a first reed assembly; and the second lens ring and the third lens ring are connected by a second reed assembly. The first lens ring rotates relative to the second lens ring; and the second lens ring rotates relatively to the third lens ring. A reflector is arranged at the first lens ring; and the third lens ring is connected with the lens seat by a switching board. According to the invention, on the basis of the reed structure, a transmission error caused by element tolerance clearance during the transmission process can be prevented; and the adjustment precision of the reflector can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of integrated circuit equipment manufacturing, in particular to a mirror precision adjustment device in photolithography equipment. Background technique [0002] Mirrors are an important part of an optical system and are used to change the direction of light propagation. [0003] In lithography equipment, due to the limitation of installation space, it is often necessary to turn the lens structure through a mirror to achieve a reasonable use of space. As the requirements for imaging quality continue to increase, the adjustment accuracy of the mirror needs to be improved accordingly, otherwise the imaging quality of the lens will be affected. [0004] figure 1 It is an existing reflector adjustment device. In this device, the reflection mirror is fixed on the mirror ring 120, and the mirror ring 120 is connected with the mirror ring 110 through the bearing 140, the shaft 130, and the mirror ring 120 can ro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/198
CPCG02B7/198
Inventor 章富平鲁武旺陈宇环马晓晴
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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