Device and method for coaxially adjusting double beams in real time
A real-time adjustment, dual beam technology for precision or ultra-precision optical measurement
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[0069] The present invention will be described in detail below with reference to the drawings and embodiments, but the present invention is not limited to this.
[0070] The structure of the dual-beam coaxial real-time adjustment device of the present invention is as follows figure 1 Shown, including:
[0071] The first laser 1 and the second laser 2; the first laser 1 emits the first incident light R1, and the second laser 2 emits the second incident light R2;
[0072] The first half of the slide 5 and the second half of the slide 6; the first half of the slide 5 adjusts the first incident light R1 to linearly polarized light in the vertical direction, and the second half of the slide 6 adjusts the second incident light R2 to the parallel direction Linearly polarized light;
[0073] The first corner cube 3 with a two-dimensional micro-displacement mechanism and the first reflector 7 with a two-dimensional angle fine-tuning mechanism constitute a first light deflecting device, which d...
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