Part for vacuum pumps and vacuum pump

A technology for vacuum pumps and parts, which is applied to pump elements, pumps, parts of pumping devices for elastic fluids, etc., can solve the problems of reduced surface unevenness, difficult to satisfy, difficult to manage the amount of grinding, etc., and achieves high adhesion. Effect

Inactive Publication Date: 2015-03-25
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0013] Here, in the case of grinding with fine abrasive grains, it is easy to satisfy the condition 1 because the amount of grinding is easy to manage, but it is not easy to satisfy the condition 3 because the unevenness of the surface is reduced.
[0014] In addition, in the case of grinding with coarse abrasive grains, it is easy to satisfy condition 3 because unevenness of an appropriate size is produced on the surface, but it is difficult to control the amount of grinding, and it is difficult to satisfy condition 1
[0015] On the other hand, in the case of grinding with medium-grade abrasive grains, neither condition 1 nor condition 3 is easy to satisfy, and it is difficult to satisfy both conditions at the same time.

Method used

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  • Part for vacuum pumps and vacuum pump
  • Part for vacuum pumps and vacuum pump
  • Part for vacuum pumps and vacuum pump

Examples

Experimental program
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Embodiment Construction

[0036] Hereinafter, embodiments for implementing the present invention will be described in detail with reference to the drawings attached to the specification.

[0037] figure 1 It is a cross-sectional view of a vacuum pump to which the present invention is applied. The vacuum pump P1 shown in the figure is used as a gas exhaust mechanism for a process chamber or other closed chambers in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, and a solar panel manufacturing apparatus.

[0038] This vacuum pump P1 has a wing exhaust part Pt for exhausting gas through the rotary vanes 13 and fixed vanes 14 , and a screw groove pump part Ps for exhausting gas through the screw grooves 19 in the package case 1 .

[0039] The packaging case 1 has a bottomed cylindrical shape in which a cylindrical pump casing 1A and a bottomed cylindrical pump base 1B are integrally connected in the direction of the cylinder axis with bolts. The upper end portion o...

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Abstract

[Problem] To provide a part for vacuum pumps and a vacuum pump for which a coating can be suitably formed on the surface of a fiber reinforced composite material. [Solution] A part for a vacuum pump is a cylindrical second cylinder member (62) made from a fiber reinforced composite material whereon a plating layer (626), which is the coating, is formed as the coating layer, on the surface thereof. The plating layer (626) is formed after a removal step of removing a portion of the surface containing a release agent layer (622) from the surface of the cylindrical second cylinder member (62), and a surface roughening step of roughening the surface (623) of the second cylinder member (62) after removing the portion of the surface containing the release agent layer (622).

Description

technical field [0001] The present invention relates to parts for vacuum pumps and vacuum pumps used in vacuum pumps used as gas exhaust mechanisms in process chambers or other closed chambers in semiconductor manufacturing equipment, flat panel display manufacturing equipment, and solar cell panel manufacturing equipment. Parts for vacuum pumps and vacuum pumps for forming coatings on the surface of fiber-reinforced composite materials. Background technique [0002] Conventionally, Patent Document 1 and Patent Document 1 are known as vacuum pumps in which a cylinder made of FRP (fiber-reinforced plastic), which is a fiber-reinforced composite material, is fixed to the lower portion of an aluminum alloy rotor blade of a turbomolecular pump to form a screw groove pump section. 2. [0003] Here, since this type of vacuum pump needs to exhaust corrosive gases, in order to prevent corrosion of various parts, it is generally provided with a corrosion-resistant coating made of ni...

Claims

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Application Information

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IPC IPC(8): F04D19/04
CPCF04D19/042F04D19/044F04D29/023F05D2300/603F05D2300/611B24C1/08F05D2300/516Y10T428/24355F04D29/26
Inventor桦泽刚志野中学
OwnerEDWARDS JAPAN