Unlock instant, AI-driven research and patent intelligence for your innovation.

An Ion Beam Smoothing Method for Curved Optical Components

An optical element and ion beam technology, applied in the field of curved optical element processing, can solve the problems of inconsistent surface material removal rate, uneven surface material removal, damage to the surface shape of optical elements, etc., and achieve the effect of improving surface roughness

Inactive Publication Date: 2017-06-13
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for curved optical elements, the incident angles of the ion beam to each point on the surface of the optical element are inconsistent, so the removal rate of the surface material is inconsistent, and the removal of the surface material is uneven, that is, while improving the surface roughness, it also destroys Surface Profile of Optical Elements

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • An Ion Beam Smoothing Method for Curved Optical Components
  • An Ion Beam Smoothing Method for Curved Optical Components
  • An Ion Beam Smoothing Method for Curved Optical Components

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0044] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation examples.

[0045] The surface shape error of an optical element refers to the difference between the surface macroscopic appearance of the optical element and the design value. Generally speaking, it will affect the imaging resolution of the optical system; while the surface roughness of the optical element refers to any Local microscopic roughness generally affects the imaging contrast of the optical system. The macro-concave-convex on the curved surface is the surface shape error, and the micro-scale undulation is the surface roughness. It should be pointed out that for practical optical elements, the scale of the surface shape error and surface roughness is on the order of nanometers to microns, while the scale of the surface profile is generally on the order of submillimeters to millimeters, that is to say, the surface can be approximately...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to an ion beam smoothing method for a curved surface optical element. The method includes the steps of step (1), detecting an initial surface shape, step (2), conducting an ion beam pre-smoothing test, step (3), detecting the surface shape again and calculating an material removing rate, step (4), drawing up a formal smoothing parameter, step (5), calculating a deterministic pre-modification amount, step (6), conducting deterministic pre-modification, step (7), conducting formal ion beam smoothing, and step (8), taking out a work piece and being over. The method can effectively solve the problem that damage is caused to an original high-precision surface shape while ion beam smoothing is conducted on the curved surface optical element. The ion beam smoothing method for the curved surface optical element can not only guarantee the surface shape precision of the original high-precision curved surface, but also effectively improve the surface roughness of the optical element.

Description

technical field [0001] The invention relates to the technical field of processing curved optical elements, in particular to an ion beam smoothing method for curved optical elements. Background technique [0002] Modern optical systems place increasingly stringent requirements on the surface roughness of optical components. In some application fields, the surface roughness requirement of optical components is even better than 0.1nm. Traditional optical component polishing technology is often difficult to meet the above-mentioned ultra-smooth surface requirements of modern optical systems, and ion beam smoothing technology based on low-energy wide-beam ion sources has emerged as the times require. This technology uses a low-energy wide-beam ion source to grazing the surface of the optical element at a large incident angle, and achieves the purpose of improving the surface roughness of the optical element under the surface migration of surface atoms. This technology has a bet...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00
CPCB24B1/00
Inventor 李云付韬韬王安定谢伟民邢廷文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI