System and method for testing temperature-varying micro-nanometer indentations with vacuum protection characteristics

Abstract

The invention relates to a system for testing temperature-varying micro-nanometer indentations with vacuum protection characteristics and a method for testing the indentations, and belongs to the field of an optical mechanical and electrical integration precision science instrument. The system comprises a vacuum chamber system, a Z-shaft direction macro-adjusting mechanism, a Z-shaft long-stroke precision pressing-in drive unit, a Z-shaft short-stroke precision pressing-in drive unit, a pressing-in displacement signal detection unit, a pressing-in loading force signal detection unit, a temperature loading and detecting unit and an X-Y precision locating platform. The system is characterized that a high-temperature heating module and an indentation loading module are reasonably integrated so that the micro-nanometer indentations are tested at a temperature field; because vacuum environment is provided, the testing results cannot be affected by an oxidized specimen surface in a heating process; two driving methods such as motor drive and piezoelectric drive are adopted, so that the loading precision of the short-stroke indentation is ensured in test, and the requirement for largely loading the stroke indentations of a special material is also met. Thus the system and the method have the wide development prospect and application value in fields such as material science, aerospace and defense military industry.

Description

technical field [0001] The invention relates to the field of optical-mechanical-electrical-integrated precision scientific instruments, in particular to a temperature-variable micro-nano indentation testing system and method with vacuum protection. It has very important scientific significance and broad application prospects in the fields of iron and steel metallurgy, non-ferrous metals, semiconductor technology, advanced materials and material science, aerospace and national defense, and will enrich the existing technology system for testing the micromechanical properties of materials. Background technique [0002] The mechanical properties of traditional metal materials usually change with the complex effects of the external temperature field and stress field. The world has increasingly stringent requirements on the performance of structural materials and functional materials, such as thermal barrier coatings, mechanical-thermal coupling characteristics of high-temperature...

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Problems solved by technology

However, this kind of commercial tester costs millions of yuan, and many high-end technologies are embargoed and banned fro

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