The invention relates to a
system for testing temperature-varying micro-nanometer indentations with vacuum protection characteristics and a method for testing the indentations, and belongs to the field of an optical mechanical and electrical integration precision science instrument. The
system comprises a
vacuum chamber system, a Z-shaft direction
macro-adjusting mechanism, a Z-shaft long-
stroke precision pressing-in drive unit, a Z-shaft short-
stroke precision pressing-in drive unit, a pressing-in displacement
signal detection unit, a pressing-in loading force
signal detection unit, a temperature loading and detecting unit and an X-Y precision locating platform. The system is characterized that a high-temperature heating module and an indentation loading module are reasonably integrated so that the micro-nanometer indentations are tested at a temperature field; because vacuum environment is provided, the testing results cannot be affected by an oxidized specimen surface in a heating process; two driving methods such as
motor drive and piezoelectric drive are adopted, so that the loading precision of the short-
stroke indentation is ensured in test, and the requirement for largely loading the stroke indentations of a special material is also met. Thus the system and the method have the wide development prospect and application value in fields such as material science,
aerospace and defense military industry.