Turbine molecular pump bearing block
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
- Publication Date
- 2015-05-20
- Estimated Expiration
- Not applicable Β· inactive patent
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Abstract
Description
technical field
[0001] The invention belongs to the technical field of vibration reduction and heat transfer of rolling bearings, and in particular relates to a bearing seat of a turbomolecular pump. The invention can be applied to the support of the rotor of the small turbomolecular pump, and can prolong the service life of the turbomolecular pump. Background technique
[0002] The rotor of the turbomolecular pump generally rotates at a speed of tens of thousands of revolutions, so that the relative speed of the moving and stationary blades is used to drive the gas molecules to obtain an ultra-high vacuum. It generally uses rolling ball bearings as its supporting components, so the vibration wear and temperature rise of the rolling bearings have a great impact on the life of the molecular pump. Generally, vibration reduction and heat conduction are realized by installing elastic elements between the outer ring of the bearing and the bearing seat.
[0003] In order to prol...