Turbine molecular pump bearing block

A technology for turbomolecular pumps and bearing housings, which is applied in the field of bearing housings of turbomolecular pumps and rotors of small turbomolecular pumps. It can solve problems such as vibration reduction of rolling bearings, reduce vibration impact, prolong service life, and reduce vibration. Effect

Inactive Publication Date: 2015-05-20
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of vibration reduction and heat transfer of rolling bearings in turbomolecular pumps in the prior art, the present invention provides a turbomolecular pump bearing housing

Method used

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  • Turbine molecular pump bearing block
  • Turbine molecular pump bearing block
  • Turbine molecular pump bearing block

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] figure 1 It is a schematic cross-sectional view of the turbomolecular pump bearing seat of the present invention, Fig. 2(a) is a cross-sectional view of the friction disc radial spring in the present invention, and Fig. 2(b) is a perspective view of the friction disc radial spring in the present invention. exist figure 1 , in Fig. 2, the turbomolecular pump bearing housing of the present invention includes wave spring 1, rotor shaft 2, rolling ball bearing 3, friction plate type radial spring 4, bearing housing 5, bearing end cover 6, damping rubber ring 7. The connection relationship is that the lower end surface of the bearing end cover 6 and the inner bottom surface of the bearing seat 5 are provided with corresponding grooves. Friction disc type radial spring 4 is housed in the inner hole of the bearing seat 5, which is used for vibration reduction and heat conduction. The rolling ball bearing 3 is placed in the inner hole of the friction type radial spring 4 . T...

Embodiment 2

[0026] The structure of this embodiment is the same as that of Embodiment 1, except that the material used for the friction disc type radial spring is spring steel. The friction plate radial spring has twelve friction plates evenly distributed along the inner circumference

[0027] The shape of the friction plate radial spring is a fractured ring structure, and there are friction plates evenly distributed along the inner circumference. The number of friction plates is set to 6~12. The cloth friction plate can increase the radial friction damping of the spring, reduce the radial vibration of the bearing and export the heat generated by the bearing. One of beryllium bronze and spring steel is used, which has a large thermal conductivity and can timely export the heat generated by the rolling bearing; the structure of uniformly distributed friction plates is beneficial to convert the vibration energy dissipation into heat export, reducing Vibration and shock of bearings.

[002...

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Abstract

The invention provides a turbine molecular pump bearing block which is applied to the field of high-speed rotating machinery such as small turbine molecular pumps. The turbine molecular pump bearing block comprises a wave spring, a rotor shaft, a rolling ball bearing, a friction plate type radial spring, a bearing block body, a bearing end cover and a damping rubber ring, the friction plate type radial spring is mounted between an outer ring of the rolling ball bearing and an inner hole of the bearing block body, made of metal materials and has elasticity by the aid of friction lugs, vibration energy is dissipated through mutual friction between the friction lugs, so that radial vibration of a bearing is reduced, thermal conductivity is high by the aid of the metal materials, heat on the bearing can be timely dissipated, radial damping and heat transfer are realized by the aid of the friction plate type radial spring, axial and radial loads of the rolling bearing are reduced, and abrasion of the bearing is decreased, so that the service life of the molecular pump is prolonged.

Description

technical field [0001] The invention belongs to the technical field of vibration reduction and heat transfer of rolling bearings, and in particular relates to a bearing seat of a turbomolecular pump. The invention can be applied to the support of the rotor of the small turbomolecular pump, and can prolong the service life of the turbomolecular pump. Background technique [0002] The rotor of the turbomolecular pump generally rotates at a speed of tens of thousands of revolutions, so that the relative speed of the moving and stationary blades is used to drive the gas molecules to obtain an ultra-high vacuum. It generally uses rolling ball bearings as its supporting components, so the vibration wear and temperature rise of the rolling bearings have a great impact on the life of the molecular pump. Generally, vibration reduction and heat conduction are realized by installing elastic elements between the outer ring of the bearing and the bearing seat. [0003] In order to prol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D29/056F04D29/58
Inventor 王文升陶继忠何朝晖郑越青朱建平胡高源杨国明张明君岳晓斌
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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