The application discloses a
neodymium-iron-
boron magnet surface coating device and relates to the technical field of
coating. The device comprises a
coating machine main body, the
coating machine main body is provided with a vacuum tank body and a sealing cover, a plurality of
sputtering targets are arranged in the vacuum tank body, the
sputtering target comprises a target material, a target shell and a compression ring, a
magnetic circuit module is arranged in the target shell, a cooling cavity is arranged in the
magnetic circuit module, a flow guide
water channel is arranged in the cooling cavity to divide the cooling cavity into an upper chamber and a lower chamber, a water outlet is arranged on the lower chamber, the flow guide
water channel is in a
closed loop structure extending downward in a spiral shape, an upward protruding
water stop boss is arranged at the joint of the head and the
tail of the flow guide
water channel, a water inlet is arranged on the upstream side of the
water stop boss, and a drainage groove is arranged on the downstream side of the
water stop boss and connected to the lower chamber. The application guides the cooling liquid, accelerates the flow rate of the cooling liquid, effectively eliminates the local stagnant area of the traditional meandering water channel, increases the
thermal contact area, solves the problem of the accumulation and blockage of the magnetic steel
corrosion products, and enables the impurities to be smoothly discharged with the cooling liquid.