Non-destructive read ferroelectric memory, its preparation method and read/write operation method
A non-destructive readout and ferroelectric memory technology, which is applied in the field of ferroelectric storage, can solve the problems of reduced ferroelectric capacitor C ratio, affecting data reading speed, and reducing device reliability, and achieves simple write operation and data retention Good properties, good for small size effects
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[0053] The following introduces some of the possible embodiments of the present invention, which are intended to provide a basic understanding of the present invention, but are not intended to identify key or decisive elements of the present invention or limit the scope of protection.
[0054] In the drawings, for the sake of clarity, the thicknesses of layers and regions are exaggerated, and the dimensional proportional relationship among the various parts in the illustration does not reflect the actual dimensional proportional relationship.
[0055] In the following embodiments, for clarity of description, the domain direction or polarization direction is exemplarily given, but it should be understood that the domain direction or polarization direction of the ferroelectric memory is not limited to the embodiment shown in the figure. out direction.
[0056] figure 1 Shown is a schematic cross-sectional structure diagram of a non-destructive readout ferroelectric memory accor...
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