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Resonator element, resonator, oscillator, electronic apparatus, and mobile object

A technology of vibrating components and electronic equipment, which is applied in the field of vibrators, electronic equipment, mobile bodies, oscillators, and vibrating components, and can solve the problems of insufficient miniaturization of vibrating components.

Active Publication Date: 2015-05-27
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, it has been found that setting the separation distance within the above range is insufficient for further miniaturization of the vibrating element.

Method used

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  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object
  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object
  • Resonator element, resonator, oscillator, electronic apparatus, and mobile object

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0087] figure 1 It is a plan view of the vibrator according to the first embodiment of the present invention. figure 2 yes figure 1 The A-A line sectional view in. image 3 yes figure 1 B-B line sectional view in. Figure 4 yes figure 1 The C-C line sectional view in. Figure 5 is a graph showing the relationship between H / L and normalized value. Figure 6 is a perspective view showing the shape and size of the vibrating arm used for the simulation. Figure 7 It is a graph showing the relationship between H / L and high performance index 1. Figure 8 It is a graph showing the relationship between the hammerhead occupancy rate and the low R1 index. Figure 9 It is a cross-sectional view of a vibrating arm illustrating heat conduction during bending vibration. Figure 10 is a graph showing the relationship between the Q value and f / fm. Figure 11 is a cross-sectional view showing a vibrating arm formed by wet etching. Figure 12 It is a graph showing the relationship b...

no. 2 Embodiment approach

[0290] Next, a second embodiment of the vibrator of the present invention will be described.

[0291] Figure 26 It is a plan view of the vibrator according to the second embodiment of the present invention.

[0292] Hereinafter, the vibrator according to the second embodiment will be described focusing on the differences from the above-mentioned first embodiment, and the description of the same matters will be omitted.

[0293] The vibrator according to the second embodiment of the present invention is the same as the above-mentioned first embodiment except that the structure of the vibrating element is different. In addition, the same code|symbol is attached|subjected to the same structure as said 1st Embodiment.

[0294] like Figure 26 As shown, in the vibrator 1A, the supporting portion 7A of the vibrating element 2A extends from the end of the base 4 in the +Y' axis direction and is located between the vibrating arms 5,6. Such vibrating element 2A is fixed to base 91...

no. 3 Embodiment approach

[0297] Next, a third embodiment of the vibrator of the present invention will be described.

[0298] Figure 27 It is a top view of a vibrator according to a third embodiment of the present invention.

[0299] Hereinafter, the vibrator according to the third embodiment will be described focusing on the differences from the first embodiment described above, and the description of the same items will be omitted.

[0300] The vibrator according to the third embodiment of the present invention is the same as the above-mentioned first embodiment except that the structure of the vibrating element is different. In addition, the same code|symbol is attached|subjected to the same structure as said 1st Embodiment.

[0301] like Figure 27 As shown, support portion 7B of vibrating element 2B has: frame-shaped frame portion 76B surrounding base portion 4 and vibrating arms 5 and 6 ; The frame portion 76B is sandwiched by the base 91 and the cover 92 , both of which are cavity-shaped, ...

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Abstract

A resonator element includes a base, a quartz crystal resonator blank which is integrally disposed with the base, and has a pair of vibrating arms which are disposed in parallel in an X axial direction, and extend from the base in a Y′ axial direction, the vibrating arms include arms, hammerheads which are positioned on tip end sides of the arms, and are longer than the arms in the X axial direction, a relationship of 0.033×T [μm]<W4<0.330×T [μm] is satisfied when the thickness of the vibrating arm is set to T in thickness, and a distance between the hammer heads in the X axial direction is set to W4.

Description

technical field [0001] The present invention relates to a vibrating element, a vibrator, an oscillator, electronic equipment, and a moving body. Background technique [0002] Conventionally, vibration elements using quartz are known. Such vibrating elements are widely used as reference frequency sources, signal sources, and the like for various electronic devices due to their excellent frequency-temperature characteristics. [0003] The vibrating element described in Patent Document 1 has a tuning-fork shape and has a base and a pair of vibrating arms extending from the base. [0004] When forming a vibrating element with the above-mentioned structure using photolithography, Patent Document 1 proposes a technique in which the distance between a pair of vibrating arms is set to 50 to 370 μm, thereby realizing the miniaturization of the formed vibrating element. change. [0005] However, it has been found that setting the separation distance within the above-mentioned range...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/19
CPCH03H9/215H03B5/32H03H9/02023H03H9/02157H03H2003/0407
Inventor 山田明法
Owner SEIKO EPSON CORP