Vacuum optical experiment system with extravehicular micro-adjusting mechanism

Abstract

The invention discloses a vacuum optical experiment system with an extravehicular micro-adjusting mechanism. According to the vacuum optical experiment system with the extravehicular micro-adjusting mechanism, a first support frame of an exhaust device and a second support frame of a vacuum chamber are arranged at the position corresponding to the vertical surface of a vibration isolation platform, and the exhaust device is placed at the upper end of the first support frame; the vacuum chamber is placed at the upper end of the second support frame; the vibration isolation platform is arranged on each air spring; the lower head face of each air spring is arranged on the ground; a cushion block and an extravehicular adjusting device are located on the vibration isolation platform; a light source and an ultraviolet monochromator are located on the corresponding cushion block; the air suction hole of each vacuum pump is connected with the corresponding exhaust holes of the exhaust device, vacuum pipe and vacuum chamber; the light source, exhaust device, ultraviolet monochromator, connecting apparatus and vacuum chamber connector is connected with the port of the corresponding vacuum pipe; the extravehicular connecting part of the extravehicular adjusting device is connected with the vibration isolation platform; the connecting end of a chamber inside connecting part is connected with the vacuum chamber through a corrugated pipe, a measured optical structure is connected with the chamber inside connecting part, and the measured optical structure is adjusted outside the vacuum chamber and moves in the vacuum chamber.

Description

technical field [0001] The invention belongs to the technical field of optical experiment and optical detection, and relates to a vacuum optical experiment system with an external fine-tuning mechanism. Background technique [0002] When the optical system is working or optical detection, it is necessary to work or experiment in a vacuum environment due to the light transmission ability or the sensitivity to the influence of airflow. In general, the relative positional relationship of the optical components in the optical system is strictly required, and the precision is high, so the adjustment process and results are very critical. However, the cavity of the vacuum system brings troubles to the installation and adjustment. Before and after the vacuum is formed, the mechanical environment of the optical structure changes. If the optical components cannot continue to maintain the original relative positional relationship, the optical system may not work, and the optical detec...

AI Technical Summary

Problems solved by technology

Generally used vacuum pumps have large vibrations, while the selection of vacuum pumps with small vibrations is limited in application

For example, although the plasma pump has no vibration, the pumping speed is small and there is saturation

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