A three-dimensional moire interferometer and material surface measurement method
A moiré interference and three-dimensional technology, applied in the direction of measuring devices, instruments, and optical devices, can solve problems that cannot meet the actual needs of engineering, improve imaging effects and measurement accuracy, increase measurement range, and make the light field uniform and clean Effect
Inactive Publication Date: 2017-10-31
NO 711 RES INST CHINA SHIPPING HEAVY IND GRP
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However, the actual measurement specimens are mostly three-dimensional objects, and the loads are mostly space loads. Therefore, the measurement of the surface deformation of the specimens is limited to in-plane measurement and cannot meet the actual needs of the project.
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[0045] The invention provides a material surface measurement method of a three-dimensional moiré interferometer, the core idea of which is: on the basis of the existing technology that can measure the displacement of the deformation of the test piece formed by U and V, introduce a beam splitting prism and a PZT The total reflection mirror of the phase shifter measures the displacement formed by the deformation of the test piece in the W field, and realizes the measurement of the three-dimensional deformation of the test piece, thereby improving the measurement range.
[0046] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0047] like figure 1 As shown, a three-dimensional moiré interferometer provided by the present invention includes: a light source 1, an optical path lifting mechanism 2, a beam expander and filtering system 3, a three-dimensional moiré instrument body 4, a specimen platform 5, a phase shi...
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The invention discloses a three-dimensional moire interferometer and a material surface measuring method. According to the three-dimensional moire interferometer and the material surface measuring method, on the basis that displacement, formed in a U-field and a V-field, of deformation of a test piece can be measured in the prior art, a beam splitter prism and total-reflection mirrors with PZT phase shifters are arranged, measurement of three-dimensional deformation can be achieved, and therefore the measurement range is expanded. In the measuring process, the total-reflection mirror M1, the total-reflection mirror M2, the total-reflection mirror K1, the total-reflection mirror K2 and an output total-reflection mirror constitute a V-field moire measurement mirror set; the total-reflection mirror M1', the total-reflection mirror M2', the total-reflection mirror K1', the total-reflection mirror K2' and the output total-reflection mirror constitute a U-field moire measurement mirror set; the beam splitter prism and the total-reflection mirror M3 constitute a W-field moire measurement mirror set; meanwhile, a collimating light calibrator is arranged and used for acquiring collimating light so that measurement of three-dimensional deformation of the test piece can be completed.
Description
technical field [0001] The invention relates to the field of non-destructive testing, in particular to a three-dimensional moiré interferometer and a material surface measurement method. Background technique [0002] Surface microscopic deformation (micron scale) is a difficult point in material research. The main manifestations are: 1. There are many kinds of materials, and there is no general-purpose detection instrument for surface microscopic deformation; 2. The actual load on the material is ever-changing, and there may be coupling of multiple loads, and the measurement environment is complex; 3. The accuracy required for micron-level measurement High, the sensitivity of the environment and measuring instruments is also high. Based on the above reasons, the measurement of surface microscopic deformation is inaccurate and even leads to measurement failure. [0003] At present, the experimental methods for micron-scale measurement of material surfaces mainly include: el...
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IPC IPC(8): G01B11/16
Inventor 陆鹏张庆刘张超邱爱华陈原伟龚礼东孙伟周唯
Owner NO 711 RES INST CHINA SHIPPING HEAVY IND GRP