Electrical contact

A technology of electrical contact and components, applied in the direction of electrical components, parts of connecting devices, circuits, etc., can solve the problems of decreased durability of contact probes, achieve the effects of inhibiting movement deterioration, preventing short circuits, and improving durability

Active Publication Date: 2015-07-01
NIHON DENSHIZAIRYO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, since the surface of the conductive layer becomes rough, there is a problem that the durability of the contact probe is reduced.
[0014] This problem exists not only in the contact probes used in the electrical

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0063] Embodiment 1.

[0064] figure 1 as well as figure 2 It is an external view showing an example of the configuration of the contact probe 101 according to Embodiment 1 of the present invention. figure 1 Is a perspective view of the contact probe 101, figure 2 (A) and (b) are side views showing different side surfaces of the contact probe 101, respectively. This contact probe 101 is a probe used for the electrical characteristic test of a semiconductor device, and is shown as an example of an electrical contact member.

[0065] The above-mentioned contact probe 101 is a vertical probe arranged perpendicular to the inspection object, and includes: a substantially linear elongated main body 1; a contact part 2 formed at the tip of the main body 1; The root end of the terminal 6 is provided. The main body 1 has a laminated structure composed of three metal layers 11 to 13, and each of the metal layers 1 to 13 has a laminated surface extending along the longitudinal direction of...

Example Embodiment

[0112] Implementation mode 2.

[0113] In the first embodiment, the contact probe 101 in which the tip portion 3 supported by the guide plate 120 has a cross-shaped cross section is described. In contrast, in the present embodiment, the contact probe 102 having a cross-shaped cross section at the root 5 supported by the guide plate 130 will be described.

[0114] Figure 8 It is an external view showing an example of the configuration of the contact probe 102 according to the second embodiment of the present invention, and (a) and (b) in the figure show different side surfaces of the contact probe 102, respectively. Picture 9 Yes means Figure 8 A cross-sectional view of a configuration example of the contact probe 102, showing the Figure 8 The section when the root 5 is cut by the C-C cutting line.

[0115] Combine the touch probe 102 of this embodiment with figure 2 Compared with the contact probe 101 (Embodiment 1), although the structure of the root 5 is different, the other s...

Example Embodiment

[0131] Implementation mode 3.

[0132] In Embodiments 1 and 2, an example of a case where the elastic deformation portion 4 is composed of three beam portions 41 to 43 has been described. In contrast, in the present embodiment, a case where the elastic deformation portion 4 is composed of one beam portion will be described.

[0133] Picture 11 It is an external view showing an example of the configuration of the contact probe 103 according to the third embodiment of the present invention, and (a) and (b) in the figure show different side surfaces of the contact probe 103, respectively. If the touch probe 103 of this embodiment is combined with Figure 8 In comparison with the contact probe 102 (Embodiment 2), although the structure of the elastically deformable portion 4 is different, the other structures are the same. Therefore, the repeated description is omitted.

[0134] The elastic deformation portion 4 is composed of a single beam portion formed by an elongated plate-shaped b...

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Abstract

The purpose of the present invention is to suppress the occurrence of shavings produced by interference of a contact probe with a guide plate. [Solution] An electrical contact provided with: a contact part (2) having a layered structured in which an intermediate metal layer (12) is sandwiched by outer-side metals layers (11, 13), and used for making contact with an object to be inspected; an elastic deformation part (4) for elastically deforming by compressive force in the lengthwise direction so as to bend in a bending direction (N) set in advance; and a distal end part (3) formed between the contact part (2) and the elastic deformation part (4) and supported by a through-hole (121) in a guide plate (120) so that the contact part (2) is able to move in the lengthwise direction. The side surfaces of the distal end part (3) formed in the bending direction (N) of the elastic deformation part (4) and the direction (N') opposite thereto are composed of the three metal layers (11 to 13), and said side surfaces are configured so that the intermediate metal layer (12) protrudes more greatly than the outer-side metal layers (11, 13).

Description

technical field [0001] The present invention relates to an electrical contact member, and more specifically, to an electrical contact member in which a contact portion is brought into contact with an electrode terminal as the elastic deformation portion is elastically deformed, for example, it relates to an electrical contact member used in an electrical characteristic test of a semiconductor device. Improvements to contact probes. Background technique [0002] The electrical characteristic test of a semiconductor device is performed by bringing the semiconductor wafer close to a probe card with many contact probes formed on the wiring board, so that each contact probe is in contact with the electrode pad on the semiconductor wafer, and the test is performed via the contact probe signal input and output. [0003] When the contact probes are brought into contact with the electrode pads, the semiconductor wafer is further brought into contact with the probe card after the two...

Claims

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Application Information

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IPC IPC(8): G01R1/073H01L21/66
CPCG01R1/06716G01R1/07357G01R1/06738H01R13/2428
Inventor 木村哲平福岛则之浦田敦夫有田直树武田朋之
Owner NIHON DENSHIZAIRYO
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