A technology of electrical contact and components, applied in the direction of electrical components, parts of connecting devices, circuits, etc., can solve the problems of decreased durability of contact probes, achieve the effects of inhibiting movement deterioration, preventing short circuits, and improving durability
- Application Information
AI Technical Summary
Problems solved by technology
 Embodiment 1.
 figure 1 as well as figure 2 It is an external view showing an example of the configuration of the contact probe 101 according to Embodiment 1 of the present invention. figure 1 Is a perspective view of the contact probe 101, figure 2 (A) and (b) are side views showing different side surfaces of the contact probe 101, respectively. This contact probe 101 is a probe used for the electrical characteristic test of a semiconductor device, and is shown as an example of an electrical contact member.
 The above-mentioned contact probe 101 is a vertical probe arranged perpendicular to the inspection object, and includes: a substantially linear elongated main body 1; a contact part 2 formed at the tip of the main body 1; The root end of the terminal 6 is provided. The main body 1 has a laminated structure composed of three metal layers 11 to 13, and each of the metal layers 1 to 13 has a laminated surface extending along the longitudinal direction of...
 Implementation mode 2.
 In the first embodiment, the contact probe 101 in which the tip portion 3 supported by the guide plate 120 has a cross-shaped cross section is described. In contrast, in the present embodiment, the contact probe 102 having a cross-shaped cross section at the root 5 supported by the guide plate 130 will be described.
 Figure 8 It is an external view showing an example of the configuration of the contact probe 102 according to the second embodiment of the present invention, and (a) and (b) in the figure show different side surfaces of the contact probe 102, respectively. Picture 9 Yes means Figure 8 A cross-sectional view of a configuration example of the contact probe 102, showing the Figure 8 The section when the root 5 is cut by the C-C cutting line.
 Combine the touch probe 102 of this embodiment with figure 2 Compared with the contact probe 101 (Embodiment 1), although the structure of the root 5 is different, the other s...
 Implementation mode 3.
 In Embodiments 1 and 2, an example of a case where the elastic deformation portion 4 is composed of three beam portions 41 to 43 has been described. In contrast, in the present embodiment, a case where the elastic deformation portion 4 is composed of one beam portion will be described.
 Picture 11 It is an external view showing an example of the configuration of the contact probe 103 according to the third embodiment of the present invention, and (a) and (b) in the figure show different side surfaces of the contact probe 103, respectively. If the touch probe 103 of this embodiment is combined with Figure 8 In comparison with the contact probe 102 (Embodiment 2), although the structure of the elastically deformable portion 4 is different, the other structures are the same. Therefore, the repeated description is omitted.
 The elastic deformation portion 4 is composed of a single beam portion formed by an elongated plate-shaped b...
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