Production method for fine spherical silicon powder

A technology of spherical silicon micropowder and production method, which is applied in the direction of silicon oxide, silicon dioxide, nanotechnology for materials and surface science, etc., can solve the problems of large investment, low output, low spheroidization rate, etc., and achieve low investment , high yield effect

Active Publication Date: 2015-07-15
甘肃纳微先导基材科技有限公司
View PDF5 Cites 22 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of large investment, low output and high cost in the production of spherical silicon micropowder at home and abroad, and the problems of low spheroidization rate, low whiteness and coarse particles in the physical method, the invention provides a new High temperature gasification production method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Embodiment 1: select high-quality natural crystal or natural quartz minerals, wash, artificially remove impurities, and then grind, pickle, and dry to make high-purity powder. The powder is sent to the gasification platform in the gasification furnace through the conveying pipeline, and the laser generator is turned on to focus the laser on the powder for radiation heating, so that the silica powder quickly reaches the boiling point temperature above 2671°C and begins to gasify and evaporate. The powder gasification speed is adapted to the feeding speed, which is a continuous gasification process. Under the action of the induced draft fan, the successively produced silica gas is sucked into the quencher for cooling, so that the gaseous silica molecules condense into spherical particles, and under the action of water cooling and air cooling, the temperature of the material is quickly reduced to below 200 °C . After being collected by a multi-stage dust collector, high-p...

Embodiment 2

[0026] Embodiment 2: select monocrystalline silicon or polycrystalline silicon leftovers, crush and grind them into sandy materials. The material is sent to the gasification platform in the gasification furnace through the conveying pipeline, and the laser is focused on the material for radiation heating, so that the temperature of the silica sand material is rapidly raised to above 3000°C, and the silicon reacts with the oxygen in the air in the furnace. This produces silica gas. Then the silicon dioxide gas produced in succession is sucked into the quencher to cool down, so that the gaseous silicon dioxide is condensed into spherical particles, and the temperature is rapidly dropped below 200°C under the action of water cooling and air cooling. After being collected by a multi-stage dust collector, high-purity micron or nano-sized spherical silica powder is obtained. The whole process of feeding, gasification, oxidation, cooling and collection is a continuous production pro...

Embodiment 3

[0027] Example 3: Select high-purity fused silica rods of appropriate specifications, send them to the gasification platform in the gasification furnace through the delivery pipeline, focus the laser on the ends of the rods and directly radiate and heat them, so that the temperature at the ends of the rods can quickly reach It begins to vaporize and evaporate above the boiling point of 2671°C. The gasification speed at the end of the bar is adapted to the feeding speed of the bar, which is a continuous gasification process. Under the action of the induced draft fan, the successively produced silicon dioxide gas is sucked into the quencher for cooling, so that the gaseous silicon dioxide is condensed into spherical particles, and the temperature is rapidly dropped below 200°C under the dual cooling of water cooling and air cooling. After being collected by a multi-stage dust collector, high-purity micron or nano-sized spherical silica powder is obtained.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
Login to view more

Abstract

The invention specifically relates to a production method for fine spherical silicon powder, which belongs to the technical field of inorganic nonmetal powder materials. The invention provides a novel high temperature gasification production method to overcome the problems of great investment, low output and high cost of a chemical method and the problems of a low spheroidization rate, low whiteness, coarse particles the like of a physical method in conventional production of fine spherical silicon powder at home and abroad. According to the method, natural crystal, quartz mineral, a silicon material, fused quartz and the like are used as raw materials; the raw materials are pretreated and then sent to a vaporizing furnace for high temperature gasification, and cooling and collection are carried out so as to obtain the micron-sized fine spherical silicon powder. With the production method provided by the invention, the fine spherical silicon powder with high quality, high purity and an amorphous form can be produced, an amorphous rate reaches 100%, and an average particle size is 0.1 to 0.3 [mu]m; exhaust gas, waste water and solid refuse are not produced in the process of production; and the production method has the advantages of small investment and high output and is applicable to large-scale industrial production.

Description

technical field [0001] The invention belongs to the technical field of inorganic non-metallic powder materials, and in particular relates to a production method of spherical silicon micropowder. Background technique [0002] Spherical silicon micropowder is the main packaging material for large-scale and ultra-large-scale integrated circuits, accounting for 70-90% of electronic packaging materials. It uses quartz as raw material to prepare high-purity, micron or nanometer, amorphous, spherical silicon micropowder (silicon dioxide) that meets the requirements of electronic packaging materials. With the rapid development of my country's microelectronics industry, large-scale and ultra-large-scale integrated circuits have higher and higher requirements for packaging materials, not only requiring ultra-fine, but also requiring high purity, especially for the spherical shape of particles. However, the preparation of spherical silica powder is an interdisciplinary and difficult p...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/12B82Y30/00
Inventor 刘音娜刘培佳王宏博刘亮
Owner 甘肃纳微先导基材科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap