Flexible substrate vacuum evaporation device and vacuum evaporation method

A flexible substrate and evaporation technology, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of easily damaged flexible substrates, and achieve the effect of improving production efficiency and continuous operation

Active Publication Date: 2015-08-26
BOE TECH GRP CO LTD
View PDF4 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention aims at the problem that the existing method of evaporating flexible substrates is easy to damage the structure that has been evaporated on the flexible substrate, and provides a flexible substrate evaporating device

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Flexible substrate vacuum evaporation device and vacuum evaporation method
  • Flexible substrate vacuum evaporation device and vacuum evaporation method
  • Flexible substrate vacuum evaporation device and vacuum evaporation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] This embodiment provides a flexible substrate evaporation device, including:

[0034] At least two reels for winding and securing the flexible substrate;

[0035] The line source unit is located on one side of the flexible substrate between the two reels, and is used for evaporating the flexible substrate between the two reels.

[0036] The flexible substrate evaporation device of this embodiment adopts a reel to wind and fix the flexible substrate, without peeling the flexible substrate from the glass substrate, and will not damage the evaporated structure on the flexible substrate. The flexible substrate vapor deposition device of the present invention can realize continuous operation and improve production efficiency. The flexible substrate vapor deposition device of the present invention is suitable for vapor deposition of all types of flexible substrates.

Embodiment 2

[0038] This embodiment provides a flexible substrate evaporation device, such as Figure 1-5 shown, including:

[0039] at least two reels 11 for winding and fixing the flexible substrate 10;

[0040] The line source unit 21 is located on one side of the flexible substrate 10 between the two reels 11 and is used for evaporating the flexible substrate 10 between the two reels 11 .

[0041] That is to say, in this embodiment, the flexible substrate 10 is first rolled onto the reel 11, and the reel 11 starts to rotate during evaporation, the flexible substrate 10 to be evaporated is transferred between the two reels 11, and the line source unit 21 is turned on. Accurate evaporation of the flexible substrate 10 between the two reels 11 is realized.

[0042] Preferably, the evaporation device for the flexible substrate 10 further includes a mask 32 for determining the pattern for evaporating the flexible substrate 10 .

[0043] That is to say, according to the requirements of th...

Embodiment 3

[0061] This embodiment provides an evaporation method for a flexible substrate, which uses the flexible substrate evaporation device in Embodiment 2 for evaporation.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a flexible substrate vacuum evaporation device and vacuum evaporation method, and belongs to the technical field of display. The device and method can solve the problem that according to an existing flexible substrate vacuum evaporation method, a structure, subjected to vacuum evaporation, on a flexible substrate is prone to being damaged. The flexible substrate vacuum evaporation device comprises at least two reels used for winding and fixing the flexible substrate, and a wire source unit located on one side of the flexible substrate between the two reels and used for carrying out vacuum evaporation on the flexible substrate between the two reels. According to the flexible substrate vacuum evaporation device, the flexible substrate is wound and fixed through the reels and does not need to be stripped from a glass substrate after vacuum evaporation, and the structure, subjected to vacuum evaporation, on the flexible substrate can not be damaged. By means of the flexible substrate vacuum evaporation device, continuous work can be achieved, and production efficiency is improved. The flexible substrate vacuum evaporation device is suitable for vacuum evaporation of flexible substrates of all types.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to an evaporation device and an evaporation method for a flexible substrate. Background technique [0002] OLED display substrate has many advantages such as self-illumination, low driving voltage, high luminous efficiency, short response time, high definition and contrast, nearly 180° viewing angle, and large-area full-color display. It is recognized by the industry as the most potential for development. display substrate. Compared with other types of display devices, one of the highlights of OLED display substrates is that flexible displays can be realized, that is, flexible display devices that are lightweight, bendable, and portable are made of bendable flexible substrates. [0003] The flexible OLED display substrate includes a thin-film transistor array formed on a flexible substrate and an anode of an OLED device controlled by the thin-film transistor array, and...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & AuthorityApplications(China)
IPC IPC(8): C23C14/24C23C14/56
CPCC23C14/562C23C16/545
Inventor赵德江
OwnerBOE TECH GRP CO LTD