Micro vibration reducing platform based on MEMS spring

A vibration isolation platform and platform technology, applied in the direction of high internal friction springs, non-rotational vibration suppression, etc., can solve the problems of small damping, damage to the vibration damping structure, and unsatisfactory effects, so as to prolong the impact time and improve the effect of small damping
CN104864010AInactive Publication Date: 2015-08-26PEKING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PEKING UNIV
Publication Date
2015-08-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a micro vibration reducing platform based on a MEMS spring. The micro vibration reducing platform mainly consists of three layers of unit vibration reducing platforms, wherein vibration reducing glue is uniformly coated on the lower surfaces of the upper and middle layers of unit vibration reducing platforms; boss arrays are arranged on the upper surfaces of the middle and lower layers of unit vibration reducing platforms; plane springs are arranged around each layer of unit vibration reducing platforms; and edge frames are arranged around the plane springs. The micro vibration reducing platform can effectively prolong the collision time and absorb the impact energy through the deformation of the plane springs and the completely inelastic collision of the boss arrays and the vibration reducing glue. After the boss arrays and the vibration reducing glue are collided, the three layers of platforms are formed to a whole, so that the spring rigidity is multiplied, and the large-damping vibration reduction is realized. If the micro vibration reducing platform is used in a liquid environment, intervals between the plane springs and the vibration reducing platforms and intervals among all layers of vibration reducing platforms can generate higher slide film damping and pressed film damping under high-frequency impact. The main structure of the micro vibration reducing platform adopts a silicon-based material; and the micro vibration reducing platform is suitable for large-scale preparation by a MEMS process.
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Description

technical field

[0001] The invention belongs to the technical field of MEMS, and in particular relates to a micro-vibration damping platform based on MEMS springs. Background technique

[0002] Micro-electromechanical system MEMS integrates micro-circuit and micro-mechanical functions. It is widely used because of its small size, light weight, low power consumption, good durability, low price, and stable performance. It is the future of national economy and military scientific research. new growth point. Many MEMS devices often need to work in harsh vibration environments. For example, MEMS devices used on spacecraft will withstand random vibration loads of 20-2000 Hz during launch, and the overload of the device can reach more than 10,000g during shooting. A slight vibration environment will affect the performance of the device, and a harsh vibration environment may even cause permanent structural damage to the device. Therefore, a vibration damping platform is needed to i...

Claims

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