Deposition reflecting film production process
A production process and reflective film technology, applied in the field of deposition reflective film production process, can solve problems such as inconvenience in production and increase in process time.
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[0014] The technical solutions in the embodiments of the present invention are clearly and completely described below.
[0015] The invention provides a production process for depositing a reflective film. The working principle is to perform a pre-deposition process while raising the temperature of a heating furnace, so as to achieve the purposes of optimizing the production process, saving production time and improving production efficiency.
[0016] The present invention will be described in further detail below in conjunction with examples and specific implementation methods.
[0017] A kind of deposition reflective film production technique, process step is as follows:
[0018] (1). Insert the silicon wafer into the graphite boat, and send the graphite boat into the heating furnace at the same time;
[0019] (2). The heating furnace is heated up, and ammonia gas and radio frequency are introduced during the heating process to carry out the pre-deposition process;
[0020...
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