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Deposition reflecting film production process

A production process and reflective film technology, applied in the field of deposition reflective film production process, can solve problems such as inconvenience in production and increase in process time.

Inactive Publication Date: 2015-09-02
JETION SOLAR HLDG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the traditional process of depositing reflective film, it mainly needs to go through: entering the furnace-heating and stabilization-pre-deposition-deposition of Si x N y - out of the furnace, at the current stage, the "heating and stabilization" step is separated from the "pre-deposition" step, which increases unnecessary process time and brings inconvenience to the production of the enterprise

Method used

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Examples

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Embodiment Construction

[0014] The technical solutions in the embodiments of the present invention are clearly and completely described below.

[0015] The invention provides a production process for depositing a reflective film. The working principle is to perform a pre-deposition process while raising the temperature of a heating furnace, so as to achieve the purposes of optimizing the production process, saving production time and improving production efficiency.

[0016] The present invention will be described in further detail below in conjunction with examples and specific implementation methods.

[0017] A kind of deposition reflective film production technique, process step is as follows:

[0018] (1). Insert the silicon wafer into the graphite boat, and send the graphite boat into the heating furnace at the same time;

[0019] (2). The heating furnace is heated up, and ammonia gas and radio frequency are introduced during the heating process to carry out the pre-deposition process;

[0020...

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Abstract

The invention discloses deposition reflecting film production process. The steps of the process include: (1) inserting a silicon wafer into a graphite boat, and feeding the graphite boat into a heating furnace; (2) heating up the heating furnace, and introducing ammonia gas and radio frequency in a heating-up process to perform a pre-deposition process; (3) introducing ammonia gas and silane to perform a deposition process; and (4) taking out the deposited silicon wafer, thereby completing the whole production process. By performing the pre-deposition process while heating up the heating furnace, the purposes of optimizing the production process and improving production efficiency are achieved.

Description

technical field [0001] The invention relates to the field of solar cell production, in particular to a production process for depositing a reflective film. Background technique [0002] In the current production process of solar cells, the production of batteries needs to go through the process of depositing reflective film to improve the quality of batteries. In the traditional process of depositing reflective film, it mainly needs to go through: entering the furnace-heating and stabilization-pre-deposition-deposition of Si x N y ——Out of the furnace, at the current stage, the "heating and stabilization" step is separated from the "pre-deposition" step, which increases unnecessary process time and brings inconvenience to the production of the enterprise. Contents of the invention [0003] In order to solve the above technical problems, the present invention proposes a production process for depositing a reflective film, so as to optimize the production process, save pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0216C23C16/02C23C16/34
CPCH01L31/02168C23C16/0272C23C16/345
Inventor 樊选东郭建东杨冬生钱明星钱小芳
Owner JETION SOLAR HLDG