Polishing machine for chemically-mechanically polishing ultrathin flexible display substrate

A flexible display and chemical mechanical technology, which is applied in the direction of surface polishing machine tools, grinding/polishing equipment, metal processing equipment, etc., to achieve the effects of easy industrialization and popularization, high polishing efficiency and low cost

Inactive Publication Date: 2015-09-23
HENAN INST OF SCI & TECH
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AI Technical Summary

Problems solved by technology

However, at present, there is no ultra-precision processing technology for Roll-to-Roll efficient flexible display substrates at home and ab

Method used

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  • Polishing machine for chemically-mechanically polishing ultrathin flexible display substrate

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Embodiment Construction

[0012] Describe embodiment in detail in conjunction with accompanying drawing,

[0013] A polishing machine for chemical mechanical polishing of ultra-thin flexible display substrates, which includes an unwinding roller 1, a winding roller 15, a horizontal roller 2, polishing roller mechanisms 5, 6, a cleaning mechanism 11, and a polishing liquid spraying device 7 1. Cleaning liquid collecting device 4, the rear of the unwinding roller is provided with a horizontal roller, the rear of the horizontal roller is provided with a rear driving wheel device 3, the rear of the rear driving wheel device is provided with a polishing roller mechanism 5, and the bottom of the polishing roller mechanism is provided with a cleaning roller mechanism. A liquid collecting device, a polishing liquid spraying device is arranged in front of the polishing roller and between the rollers of the polishing roller mechanism, a front driving wheel device 8 is arranged at the rear of the polishing roller ...

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Abstract

The invention discloses a polishing machine for chemically-mechanically polishing an ultrathin flexible display substrate. The technical scheme mainly includes that a horizontal roller is arranged behind an unwinding roller, a rear driving wheel device is arranged behind the horizontal roller, a polishing roller mechanism is arranged behind the rear driving wheel device, a cleaning liquid collecting device is arranged below the polishing roller mechanism, polishing liquid spraying devices are arranged in the front of a polishing roller and between rollers of the polishing roller mechanism, a front driving wheel device is arranged behind the polishing roller mechanism, s guide wheel is arranged behind the front driving wheel device, a cleaning mechanism is arranged behind the guide wheel, an air spraying device is arranged behind the cleaning mechanism, the cleaning liquid collecting device is arranged below the air spraying device, and a winding roller is arranged behind the air spraying device. The polishing machine has the advantages of simple structure and low cost.

Description

Technical field: [0001] The invention relates to ultra-precision processing technology in the manufacture of microelectronics, optoelectronics, and flexible display substrates, in particular to a polishing machine for polishing ultra-thin flexible display substrates involving ultra-thin flexible metal and non-metallic materials. Background technique: [0002] Microelectronics, optoelectronics, and integrated circuit manufacturing are basic and strategic industries integrating national interests, human wisdom, and the latest technology. They are one of the important symbols to measure a country's status and comprehensive national strength. In the fastest field, only by mastering advanced microelectronics and optoelectronics manufacturing technology can we effectively control costs and expand production scale, and survive and develop in the fierce market competition. As the basic industry, leading industry, pillar industry and strategic industry of the national economy, ad...

Claims

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Application Information

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IPC IPC(8): B24B29/02B24B57/02B24B57/00
CPCB24B29/02B24B57/00B24B57/02
Inventor 苏建修王占奎姚建国李勇峰庞子瑞马利杰郭昊付素芳
Owner HENAN INST OF SCI & TECH
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