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a substrate rack

A technology for a substrate holder and a glass substrate, which is applied in the field of substrate holders, can solve the problems of low production efficiency, increased cost, diffraction, etc., and achieves the effects of easy replacement and improved production efficiency.

Active Publication Date: 2017-11-14
凯盛科技股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are mainly two types of substrate holders widely used in the coating industry: one is to make a surround-type substrate holder according to the size of the glass substrate, which can only coat fixed-size glass substrates; the other The second is to make up and down clamping substrate holders. Although this kind of substrate holder can be adjusted within a certain size, it cannot produce large-sized glass, and has the defect of diffraction, that is, there will be a film on the edge of the other side of the glass. deposition
[0003] In the production process, in order to meet the continuous production of products of different sizes, it is often necessary to make substrate racks of various sizes and specifications. On the one hand, the cost is increased, and on the other hand, the process of replacing the substrate racks also wastes a lot of time, and the production efficiency is low.

Method used

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Embodiment Construction

[0012] Such as figure 1 As shown, the present invention provides a substrate frame, comprising a rectangular frame body connected to each other by an upper beam 1, a lower beam 2, a left side beam 3 and a right side beam 4, and a cross-shaped connecting rod is arranged on the frame body 5. The four ends of the cross-shaped connecting rod 5 are respectively connected to the upper beam 1, the lower beam 2, the left beam 3 and the right beam 4 of the frame body; The lower adjustment cross bar 7, the left adjustment vertical bar 8 and the right adjustment vertical bar 9 are connected to each other to form a well-shaped adjustment frame.

[0013] The upper part of the left side beam 3 is provided with a vertical first upper slot 3a, and the lower part is provided with a vertical first lower slot 3b; the upper part of the right side beam 4 is provided with a vertical second upper slot 4a, and the lower part There is a vertical second lower slot 4b; the top of the left adjustment ve...

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Abstract

The invention discloses a substrate frame, which comprises a rectangular frame body connected to each other by an upper beam, a lower beam, and two side beams. A cross-shaped connecting rod is arranged on the frame body, and four ends of the cross-shaped connecting rod The upper beam, the lower beam and the two side beams of the frame body are respectively connected; the frame body is also equipped with a well-shaped adjustment frame composed of an upper adjustment bar, a lower adjustment bar, a left adjustment vertical bar and a right adjustment vertical bar. ; Cross-shaped connecting rods, two side beams, left and right adjustment vertical rods and upper and lower adjustment cross bars are provided with slots along their respective directions, so that each adjustment rod can be connected to each other through the slots, and can Adjust and move along the slot hole horizontally or vertically to form a fixed frame that can adapt to glass substrates of different sizes, which is easy to replace and improves production efficiency; the edges of the glass substrate are blocked around, and no diffraction phenomenon occurs.

Description

technical field [0001] The invention relates to the field of glass vacuum coating equipment, in particular to a substrate frame for fixing and carrying glass substrates on the glass vacuum coating equipment. Background technique [0002] In the field of liquid crystal screen production, it is necessary to perform vacuum coating operations on glass. In this vacuum coating operation, a substrate holder is required to fix the glass substrate and transfer it to the vacuum coating equipment. At present, there are mainly two types of substrate holders widely used in the coating industry: one is to make a surround-type substrate holder according to the size of the glass substrate, which can only coat fixed-size glass substrates; the other The second is to make up and down clamping substrate holders. Although this kind of substrate holder can be adjusted within a certain size, it cannot produce large-sized glass, and has the defect of diffraction, that is, there will be a film on th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50
Inventor 茆令文鲍兆臣张少波陶明山
Owner 凯盛科技股份有限公司