A Mach-Zehnder Modulated Resonant Cavity Sensor Based on Vernier Effect

A vernier effect and modulation technology, which is applied in the measurement of phase influence characteristics, etc., can solve the problems of small detection range, difficulty in miniaturization and portability of devices, and difficulty in making devices, so as to improve sensitivity, facilitate miniaturization and array The effects of optimizing and extending the quasi-free spectral range

Inactive Publication Date: 2017-08-01
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0004] However, the existing single Mach-Zehnder coupled micro-ring sensing structure has a small detection range, and it is difficult to manufacture the device and it is difficult to realize the miniaturization and portability of the device.

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  • A Mach-Zehnder Modulated Resonant Cavity Sensor Based on Vernier Effect
  • A Mach-Zehnder Modulated Resonant Cavity Sensor Based on Vernier Effect
  • A Mach-Zehnder Modulated Resonant Cavity Sensor Based on Vernier Effect

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Embodiment Construction

[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0021] Such as figure 1 and figure 2 As shown, a Mach-Zehnder-modulated resonant cavity sensor based on the vernier effect in this embodiment includes an SOI substrate composed of a silicon-based layer 5, a silicon dioxide layer 6 and a single-crystal silicon layer that are sequentially stacked and bonded from bottom to top. , the single crystal silicon layer of the SOI substrate contains a U-shaped waveguide 1 and a ring resonant cavity 2 in the same plane, and the U-shaped waveguide 1 and the ring resonant cavity 2 are passive ridge waveguides or strip waveguides; wherein the U-shaped waveguide 1 includes the first A coupled straight waveguide 11, a second coupled straight waveguide 12, a first circular arc connecting waveguide 13, a third coupled straight waveguide 14, a fourth coupled straight waveguide 15, a second circular arc connecti...

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Abstract

The invention discloses a Mach-Zehnder modulated resonant cavity sensor based on the vernier effect, which comprises an SOI substrate composed of a silicon base layer, a silicon dioxide layer and a single crystal silicon layer sequentially stacked and bonded from bottom to top, and the SOI substrate The single crystal silicon layer contains the U-shaped waveguide and the ring resonator in the same plane. The Mach-Zehnder modulated resonant cavity sensor of the present invention adopts the sensing structure of the cascaded double Mach-Zehnder interferometer and the ring resonant cavity to carry out secondary modulation on the ring resonant cavity, so that the Mach-Zehnder interferometer and the ring resonant cavity The spectrum is effectively superimposed together, which can improve the alignment accuracy based on the vernier effect, thereby effectively improving the sensitivity of the device and realizing the detection of a large dynamic range. In addition, the use of this structured integration can not only reduce the overall size of the device, facilitate the miniaturization and arraying of the device, but also significantly expand the quasi-free spectral range of the device.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of photobiochemical sensing technology, and particularly relates to a Mach-Zehnder modulated resonant cavity sensor based on the vernier effect. Background technique [0002] Since entering the 21st century, with the rapid development of science and technology, people's living standards have been continuously improved, but at the same time, more and more environmental problems have become increasingly prominent. In aspects closely related to one's own health, such as environmental monitoring, disease treatment, etc., the safety requirements for food, medicine, and water quality have also increased significantly. At the same time, on the military battlefield, biological and chemical weapons, as a new type of intelligent weapon, are gradually applied to modern warfare. Therefore, there i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/45
Inventor 王卓然袁国慧陈昱任孙文瀚王军
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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