Device for removing metal impurities from chlorosilane gas and silicon production system having same
A metal impurity and production system technology, applied in the direction of halosilane, silicon, silicon halide compounds, etc., can solve problems such as clogging equipment and pipelines, and achieve the effect of avoiding clogging
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[0029] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0030] Such as figure 1 and figure 2 As shown, the present embodiment provides a device for removing metal impurities of chlorosilane gas, the device includes a cylinder body 10, a cooling water jacket 20 and a baffle assembly 30, wherein the cooling water jacket 20 is sleeved on the cylinder body 10, and the cooling water jacket 20 forms a cooling channel surrounding the cylinder body 10, the cooling water circulates in the cooling water channel to cool down the chlorosilane gas flowing in the cylinder body, and the baffle assembly 30 is detachably installed on the cylinder body In the communication cavity of the body 10, the baffle component 30 is used to delay the flow of chlorosilane gas...
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