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A crystal oscillator replacement system and replacement process for maintaining continuous operation of a coating machine

A technology of crystal oscillator and coating machine, which is applied in metal material coating process, sputtering coating, ion implantation coating, etc., can solve the unfavorable development prospect of high-yield coating machine, extended coating working time of coating machine, and impact on work quality To achieve the effect of shortening the time for air pressure adjustment and shutdown replacement, improving work efficiency and production capacity, and high positioning accuracy

Inactive Publication Date: 2017-10-03
华有光电(东莞)有限公司
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  • Claims
  • Application Information

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Problems solved by technology

[0002] In the vacuum coating machine, the environment inside the furnace body of the coating machine is in a vacuum state, so when the coating machine is working, it is necessary to ensure its sealing performance. During the coating process, a crystal oscillator is required, and the crystal oscillator needs to be replaced regularly when it is working in the coating machine, but When the existing crystal oscillator is replaced, it is necessary to stop the machine, and adjust the coating machine to the normal pressure state, then open the corresponding equipment, and then replace the crystal oscillator, seal the machine after the replacement is completed, and adjust the machine to adjust It can be seen that the process of replacing the crystal oscillator in this coating operation is extremely cumbersome, and it is necessary to suspend the work of the machine and adjust the environmental state, so that the coating working time of the coating machine is greatly prolonged, resulting in its work quality. Affected, but the work efficiency is not high, and it is not conducive to the development prospect of high-yield operation of coating machine

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  • A crystal oscillator replacement system and replacement process for maintaining continuous operation of a coating machine

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specific Embodiment approach

[0029] A crystal oscillator replacement system that maintains the continuous operation of a coating machine, the replacement system mainly includes a crystal oscillator replacement mechanism 1 installed from top to bottom, a plug-in device 2 and a coating machine furnace body 3, wherein the crystal oscillator The replacement mechanism 1 is mainly composed of a magnetic force transmission rod device 12, a magnetic force transmission rod slider 13, a top cover 11 and a crystal oscillator fixture 14. The magnetic force transmission rod device 12 includes a loading sleeve 122, a transmission thin rod 124 and an upper , lower bottom plates 121, 123, the loading sleeve 122 is a long cylindrical structure with a hollow interior, the transmission thin rod 124 is arranged in parallel on the side of the loading sleeve 122, and the upper and lower bottom plates 121, 123 are connected between the loading sleeve 122 and the transmission The upper and lower ends of the thin rod, and the two ...

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Abstract

The invention relates to the field of a replacement device for automatic equipment replacement of a coating machine in a vacuum state, in particular to a crystal oscillator replacement system and its replacement process for maintaining the continuous operation of the coating machine without affecting the operation of the coating machine. The replacement system mainly includes the crystal oscillator replacement mechanism installed from top to bottom, the inserting board device and the coating machine furnace body. The crystal oscillator replacement mechanism is mainly composed of a magnetic transmission rod device, a magnetic transmission rod slider, a top cover and a crystal oscillator fixture. , the magnetic transmission rod device includes a loading sleeve, a thin transmission rod and upper and lower bottom plates. The crystal oscillator fixture is sleeved in the loading sleeve, and the crystal oscillator is loaded on the fixture body. The upper end is axially fixed with a long rod and an inner slider. , the inner slider is a magnet that magnetically attracts the slider of the magnetic force transmission rod, forming a movement structure in which the jig of the crystal oscillator and the slider of the magnetic force transmission rod slide along the inside and outside of the loading sleeve; the invention shortens the time for adjusting air pressure and shutting down for replacement , while improving work efficiency and production capacity.

Description

technical field [0001] The invention relates to the field of a replacement device for automatic equipment replacement of a coating machine in a vacuum state, in particular to a crystal oscillator replacement system that maintains the continuous operation of the coating machine and its replacement without affecting the operation of the coating machine during the replacement of the crystal oscillator craft. Background technique [0002] In the vacuum coating machine, the environment inside the furnace body of the coating machine is in a vacuum state, so when the coating machine is working, it is necessary to ensure its sealing performance. During the coating process, a crystal oscillator is required, and the crystal oscillator needs to be replaced regularly when it is working in the coating machine, but When the existing crystal oscillator is replaced, it is necessary to stop the machine, and adjust the coating machine to the normal pressure state, then open the corresponding ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56
Inventor 刘双良
Owner 华有光电(东莞)有限公司
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