A crystal oscillator replacement system and replacement process for maintaining continuous operation of a coating machine
A technology of crystal oscillator and coating machine, which is applied in metal material coating process, sputtering coating, ion implantation coating, etc., can solve the unfavorable development prospect of high-yield coating machine, extended coating working time of coating machine, and impact on work quality To achieve the effect of shortening the time for air pressure adjustment and shutdown replacement, improving work efficiency and production capacity, and high positioning accuracy
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[0029] A crystal oscillator replacement system that maintains the continuous operation of a coating machine, the replacement system mainly includes a crystal oscillator replacement mechanism 1 installed from top to bottom, a plug-in device 2 and a coating machine furnace body 3, wherein the crystal oscillator The replacement mechanism 1 is mainly composed of a magnetic force transmission rod device 12, a magnetic force transmission rod slider 13, a top cover 11 and a crystal oscillator fixture 14. The magnetic force transmission rod device 12 includes a loading sleeve 122, a transmission thin rod 124 and an upper , lower bottom plates 121, 123, the loading sleeve 122 is a long cylindrical structure with a hollow interior, the transmission thin rod 124 is arranged in parallel on the side of the loading sleeve 122, and the upper and lower bottom plates 121, 123 are connected between the loading sleeve 122 and the transmission The upper and lower ends of the thin rod, and the two ...
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