Probe sensing method and device based on beam scanning confocal detection technology

Abstract

A probe sensing method and apparatus based on an optical beam scanning confocal detection technique. The method comprises: laser beams are incident to the interior of an optical fibre probe (1) from an incident end of the optical fibre probe (1) via a lens; incident beams are emergent from the incident end of the optical fibre probe (1) after being reflected by an optical fibre grating structure (1c) in the interior of the optical fibre probe (1); emergent beams of the optical fibre probe (1) are focused to a photoelectric detector via the lens; lateral photoelectric detectors (7, 16) are used to detect the position of a focused light spot to measure the lateral displacement of the optical fibre probe (1); and an axial photoelectric detector (19) is used to detect light intensity of the focused light spot to measure the axial displacement of the optical fibre probe (1) for completing three-dimensional sensing. The method and apparatus have the characteristics that a probe is easy to manufacture and easy to miniaturize, detection light has high intensity and is easy to detect, and the apparatus has capacities of three-dimensional detection and demodulation, and a high resolution.

Description

technical field [0001] The invention belongs to the technical field of size measurement, and mainly relates to a probe sensing method and device based on beam scanning confocal detection technology. Background technique [0002] In the field of cavity structure measurement with micro-size and large depth-to-diameter ratio, the use of optical fiber to make probes is an important solution, which has the advantages of easy miniaturization and easy fabrication. The existing probes are as follows: [0003] (1) The "dual optical fiber coupling contact micro-measurement force aiming sensor" described in the application number 200510072254.5. In this patent, a new structure sensor is proposed, which uses two optical fibers to burn coupling balls to realize the reverse direction of light transmission and detection of the outgoing light. [0004] Similar patents include: dual-fiber co-spherical coupling micro-measurement force aiming sensor with end-face microstructure (application n...

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Problems solved by technology

But the experiment was not successful, the sensing signal was completely submerged in the noise signal and could not be detected

[0012] The disadvantages of the existing probes described in the above-mentioned documents and the referenced documents mentioned above are: (1) the probes are difficult to manufacture and are not easy to miniaturize; (2) the intensity of the probe light is weak and difficult to detect; ( 3) No three-dimensional detection ability or weak three-dimensional detection ability; (4) low resolution

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