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MEMS switch with internal conductive path

A technology of conductive channels and inner conductors, applied in the field of MEMS switches, can solve problems such as increasing the risk of short circuit in the expected closed circuit

Active Publication Date: 2015-11-04
ANALOG DEVICES INT UNLTD CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Undesirably, covers can increase the risk of short circuits from intended closed circuits

Method used

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  • MEMS switch with internal conductive path
  • MEMS switch with internal conductive path
  • MEMS switch with internal conductive path

Examples

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Embodiment Construction

[0022] In an illustrative embodiment, a MEMS switch within a wafer-level package more efficiently transfers signals between its internal movable parts and external pads while reducing shorting to its lid. To this end, MEMS switches are formed on a chip with internal conductors electrically connected between the movable part and external pads. One or more vias extending from the device surface to the internal conductors reduce signal impedance, thereby increasing efficiency. Furthermore, the insulating material between the inner conductor and the adhesive material connecting the cover to the switch chip reduces short circuits to its cover through the adhesive material. Details of illustrative embodiments are discussed below.

[0023] figure 1 A circuit that may use a MEMS switch 10 configured in accordance with an illustrative embodiment of the invention is schematically shown. In fact, the figure shows a very simplified circuit in which the MEMS switch 10 can open and close...

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Abstract

A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.

Description

[0001] priority [0002] This patent application is filed April 25, 2014 and is entitled "MEMS Switches" and is named after Harrington L. Fitzgerald, Jo-Ann Wang, Raymond Youger, Bernard Stenson, Paul Lambin, and Mark Silmer are named inventors as continuation-in-part of US Patent Application No. 14 / 262,188, the disclosure of which is incorporated herein by reference in its entirety. technical field [0003] The present invention relates generally to MEMS switches, and more particularly, the present invention relates to improving current flow through MEMS switches. Background technique [0004] A variety of devices use MEMS switches to selectively transfer current between two points. To this end, MEMS switches typically include movable microstructures, such as cantilevers, that selectively make contact with adjacent conductors. A brake electrode (or other brake mechanism) can apply a force, such as an attractive electrostatic attraction, to the cantilever, urging the arm t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00
CPCH01H59/0009B81B7/007B81C1/00341H01H1/0036H01H2001/0084B81B2201/014B81B2207/092
Inventor C·F·李R·C·格金P·L·菲兹格拉德B·P·斯坦森M·舍默尔J-E·王
Owner ANALOG DEVICES INT UNLTD CO
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