Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Draft tube for single crystal furnace

A technology of a guide tube and a single crystal furnace, which is applied in the field of the guide tube, can solve the problems of increasing energy consumption, shaking of single crystal silicon rods, and strengthening of airflow intensity.

Inactive Publication Date: 2015-12-02
JIANGSU HUASHENG TIANLONG PHOTOELECTRIC
View PDF9 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the diameters of the upper and lower ends of the existing draft tube are different, and they decrease gradually from the upper end to the lower end. In this way, due to the reduction of the flow surface of the gas, the flow velocity of the gas passing through the section increases, and the sudden increase of the flow velocity will The fluctuation of the air flow is caused, and the air flow intensity will be strengthened when the argon flow enters the lower end of the single crystal furnace, resulting in the shaking of the single crystal silicon rod, the fluctuation of the liquid level, and in severe cases, it may cause production accidents such as rod drop
In addition, when the existing draft tube radiates heat, it radiates heat to the surroundings of the furnace wall, which increases energy consumption

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Draft tube for single crystal furnace
  • Draft tube for single crystal furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] Such as figure 1 and figure 2 The shown guide tube for single crystal furnace includes a trumpet-shaped cylinder body 4, a feed flange 1 and a discharge flange 5, and the feed flange 1 and discharge flange 5 are respectively connected On the narrow-mouth end and the wide-mouth end of the horn-shaped cylinder 4, an extension device is arranged between the narrow-mouth end of the horn-shaped cylinder 4 and the feeding flange 1, and the described horn-shaped cylinder 4 A baffle 9 is arranged between the wide mouth end of the outlet and the discharge flange 5, and a baffle 9 is arranged inside the trumpet-shaped cylinder 4, and through holes 10 are evenly arranged on the baffle, and the A filter plate 12 is also arranged between the lower end of the deflector and the side wall of the horn-shaped cylinder 4, and an inspection port is also provided on the side wall of the horn-shaped cylinder 4, and the horn-shaped cylinder outside the inspection port An observation window...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a draft tube for a single crystal furnace. The draft tube comprises a horn-shaped tube body, a feeding flange and a discharging flange, wherein the feeding flange and the discharging flange are connected to a narrow opening end and a wide opening end of the horn-shaped tube body respectively, a lengthening device is arranged between the narrow opening end of the horn-shaped tube body and the feeding flange, a baffle is arranged between the wide opening end of the horn-shaped tube body and the discharging flange, guide plates are arranged in the horn-shaped tube body, through holes are uniformly formed in the guide plates, filter plates are further arranged between the lower ends of the guide plates and the side wall of the horn-shaped tube body, an overhaul port is further formed in the side wall of the horn-shaped tube body, and the side wall, located on the outer side of the overhaul port, of the horn-shaped tube body is further movably connected with an observation window. By means of the design, the flowing area is increased through the guide plates, so that substances more uniformly and stably flow, and the utilization rate of the draft tube is increased.

Description

technical field [0001] The invention relates to a component of a single crystal furnace, in particular to a draft tube for a single crystal furnace. Background technique [0002] As an important part of the single crystal furnace, the guide tube plays an important role in the production of single crystal silicon. The guide tube of the single crystal furnace has a great influence on the crystal growth. The use of a draft tube can reduce the argon flow vortex cells on the upper part of the furnace body, thereby reducing the deposition of Si0 on the upper part of the single crystal furnace, thereby ensuring the high quality of the drawn single crystal silicon rods. However, the diameters of the upper and lower ends of the existing draft tube are different, and they decrease gradually from the upper end to the lower end. In this way, due to the reduction of the flow surface of the gas, the flow velocity of the gas passing through the section increases, and the sudden increase of...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00
Inventor 潘清跃王平
Owner JIANGSU HUASHENG TIANLONG PHOTOELECTRIC
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products