Draft tube for single crystal furnace

Abstract

The invention relates to a draft tube for a single crystal furnace. The draft tube comprises a horn-shaped tube body, a feeding flange and a discharging flange, wherein the feeding flange and the discharging flange are connected to a narrow opening end and a wide opening end of the horn-shaped tube body respectively, a lengthening device is arranged between the narrow opening end of the horn-shaped tube body and the feeding flange, a baffle is arranged between the wide opening end of the horn-shaped tube body and the discharging flange, guide plates are arranged in the horn-shaped tube body, through holes are uniformly formed in the guide plates, filter plates are further arranged between the lower ends of the guide plates and the side wall of the horn-shaped tube body, an overhaul port is further formed in the side wall of the horn-shaped tube body, and the side wall, located on the outer side of the overhaul port, of the horn-shaped tube body is further movably connected with an observation window. By means of the design, the flowing area is increased through the guide plates, so that substances more uniformly and stably flow, and the utilization rate of the draft tube is increased.

Description

technical field [0001] The invention relates to a component of a single crystal furnace, in particular to a draft tube for a single crystal furnace. Background technique [0002] As an important part of the single crystal furnace, the guide tube plays an important role in the production of single crystal silicon. The guide tube of the single crystal furnace has a great influence on the crystal growth. The use of a draft tube can reduce the argon flow vortex cells on the upper part of the furnace body, thereby reducing the deposition of Si0 on the upper part of the single crystal furnace, thereby ensuring the high quality of the drawn single crystal silicon rods. However, the diameters of the upper and lower ends of the existing draft tube are different, and they decrease gradually from the upper end to the lower end. In this way, due to the reduction of the flow surface of the gas, the flow velocity of the gas passing through the section increases, and the sudden increase of...

AI Technical Summary

Problems solved by technology

However, the diameters of the upper and lower ends of the existing draft tube are different, and they decrease gradually from the upper end to the lower end. In this way, due to the reduction of the flow surface of the gas, the flow velocity of the gas passing through the section increases, and the sudden increase of the flow velocity will The fluctuation of the air flow is caused, and the air flow intensity will be strengthened when the argon flow enters the lower end of the single crystal furnace, resulting in the shaking of the single crystal silicon rod, the fluctuation of the liquid level, and in severe cases, it may cause production accidents such as rod drop

In addition, when the existing draft tube radiates heat, it radiates heat to the surroundings of the furnace wall, which increases energy consumption

Images