A holographic detection method for shape and position error of high-precision static pressure guide rail

Abstract

A holographic detection method for shape and position errors of high-precision static pressure guide rails, comprising the following steps: the first step is to build an optical detection system for shape and position errors; the optical detection system for shape and position errors includes a large adjustment table, a high-precision end gear plate, and a small adjustment table , High-precision thirty-six prism and wave surface interferometer, the large adjustment table is composed of a table top and three height-adjustable threaded support feet, the high-precision end tooth plate is fixed on the table top, and the small adjustment table is fixed on the high-precision end tooth plate , the high-precision thirty-six prisms are placed on the small adjustment table; then the high-precision thirty-six prisms are used to calibrate the built-up shape error optical detection system; finally, the to-be-tested guide rails are detected. The invention has high detection precision and complete detection data. It directly obtains the holographic data of the comprehensive error of the shape and position of the guide rail to be tested, so as to guide the error correction processing to make the data more accurate and complete, and greatly improve the processing efficiency.

Description

technical field [0001] The invention belongs to the field of precision manufacturing and relates to a process method for detecting shape and position errors of high-precision static pressure guide rails. Background technique [0002] As the reference component of the hydrostatic shafting system, the manufacturing accuracy of the hydrostatic guide rail directly determines the motion accuracy of the system. Hydrostatic guide rail parts not only require high shape accuracy of each surface, but also require high positional accuracy such as parallelism and perpendicularity between each surface. Traditional guide rails are generally made of carbon steel or granite, and the traditional mechanical measurement and evaluation methods for shape and position errors are used, which makes it difficult to achieve high-precision manufacturing requirements. First of all, the measurement accuracy of its shape and position error is limited by the accuracy of the coordinate measuring instrumen...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the shortcomings of low detection accuracy and insufficient data resolution of traditional static pressure guide rails, and provide a high-precision static pressure guide rail shape and position based on wavefront interferometry for optical material static pressure guide rails. Error Holographic Detection Method

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