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A preparation method of flexible neural microelectrode pads for visual prosthesis

A visual prosthesis and micro-electrode technology, applied in the direction of electrodes, internal electrodes, medical science, etc., can solve the problems of poor heat resistance, low permeability and biocompatibility, and achieve the effect of improving the electrode pad part

Active Publication Date: 2017-12-15
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The article proves that Parylene C has low permeability and good biocompatibility, and it also mentions that Parylene C has poor heat resistance

Method used

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  • A preparation method of flexible neural microelectrode pads for visual prosthesis
  • A preparation method of flexible neural microelectrode pads for visual prosthesis
  • A preparation method of flexible neural microelectrode pads for visual prosthesis

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0032] Such as figure 1 As shown in (a)-(f), this embodiment provides a method for preparing a flexible neural microelectrode pad for a visual prosthesis combined with parylene and polyimide, which is prepared according to the following steps:

[0033] 1. If figure 1 As shown in middle (a), deposit a layer of parylene (Parylene C) film 5-20 microns on the silicon substrate;

[0034] 2. If figure 1 As shown in (b), on the parylene film deposited in the first step, a patterned metal film layer is formed by sputtering, photolithography and ion beam etching. The material of the metal film layer is gold (Au) , with a thickness of 100-300 nanometers; in order to ensure good adhesion between the inert metal gold and the underlying parylene, it is necessary to deposit a layer of active metal chromium (Cr) as a seed layer with a thickness of 10-30 nanometers; spin-coat photoresist And expose 25 solder joint holes, etch away the parylene below all solder joint holes by reactive ion e...

Embodiment 2

[0043] This embodiment provides a method for preparing a flexible neural microelectrode pad for a vision prosthesis combined with parylene and polyimide similar to that of Embodiment 1. The specific process is as follows:

[0044] 1. Deposit a layer of parylene C (Parylene C) film of 5-20 microns on the glass substrate;

[0045] 2. On the deposited parylene film, a patterned metal film layer is formed by sputtering, photolithography and ion beam etching. The metal film layer is made of platinum (Pt) and has a thickness of 100 to 300 nanometers; In order to increase the adhesion of the inert metal platinum and the underlying parylene, a layer of titanium (Ti) needs to be deposited first, with a thickness of 100 nanometers; the poly pairs under all solder joint holes are etched away by reactive ion etching (RIE). Xylene;

[0046] 3. On each circular platinum solder joint at the pad end, use photolithography to form a circular polyimide (Polyimide) whose inner diameter and outer...

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Abstract

The invention provides a method for preparing a flexible nerve microelectrode pad for a visual prosthesis, comprising: depositing a layer of parylene film on a substrate; forming a patterned metal thin film by sputtering, photolithography and ion beam etching Layer, spin-coat photoresist and expose all solder joint holes, etch away the parylene under the solder joint holes by reactive ion etching; use photolithography to form annular polyimide on each annular metal solder joint at the pad end amine, and expose the localized gold area around the annular metal pad hole; form a thin annular metal layer on top of the annular polyimide by sputtering, photolithography, and ion beam etching; realize the annular polyimide by electroplating metal process The connection of the upper and lower ring-shaped gold layers; deposit a layer of parylene film for packaging, expose the ring-shaped metal conductive window by reactive ion etching, and then release the entire electrode including the pad from the substrate. The invention ensures the transparency, low permeability and biocompatibility of the electrode.

Description

technical field [0001] The invention relates to a method for preparing a microelectrode in the technical field of biomedical engineering, in particular to a method for preparing a flexible neural microelectrode pad of a visual prosthesis combined with parylene and polyimide. Background technique [0002] With the advancement and intersection of biomedical technology, bionic technology, electronic technology and other disciplines, it is possible to restore the visual nerve function and restore the vision of the blind through neural prosthesis. Implantable flexible neural microelectrodes directly interact with the cells in the tissue. The substrate material needs to have good biocompatibility, corrosion resistance, insulation, water resistance, good flexibility, elasticity and stress. Currently, it is most commonly used in the retina The organic polymer materials used to make flexible neural microelectrodes for the prosthesis include polyimide, parylene, and polydimethylsiloxa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61N1/05A61F9/00A61L31/12
Inventor 刘景全吉博文康晓洋杨斌陈翔杨春生
Owner SHANGHAI JIAOTONG UNIV