Ultrasonic vibration polishing grinding head device capable of suppressing intermediate frequency errors of optical components

Abstract

The invention discloses an ultrasonic vibration polishing grinding head device capable of restraining medium frequency errors of optical elements. The ultrasonic vibration polishing grinding head device comprises a polishing tool body, a grinding disc, flexible hinge grinding heads and an ultrasonic vibration device capable of driving the polishing tool body for conducting ultrasonic vibration. The grinding disc is rotationally installed on the polishing tool body. A plurality of holes are formed in the grinding disc. The flexible hinge grinding heads are installed in the holes through flexible hinges. Compared with the prior art that corrugated strips are likely to be introduced and medium frequency errors are likely to be generated during traditional small grinding head polishing, the ultrasonic vibration grinding head device enables the whole grinding disc to move in disorder through matching of ultrasonic vibration and movement of the flexible hinge grinding heads, and therefore the medium frequency errors can be effectively removed.

Description

technical field [0001] The invention relates to a small ultrasonic vibration polishing grinding head, in particular to an ultrasonic vibration polishing grinding head device capable of suppressing intermediate frequency errors of optical elements. Background technique [0002] With the development of science and technology and the improvement of manufacturing level, and driven by the national major optical engineering tasks and the growth of demand for optoelectronic products, high-precision optical components are more and more widely used in various fields. Especially in large-scale optical engineering, a large number of high-precision optical components are used, such as: aerospace, strong laser devices, etc., which put forward higher requirements for the accuracy of optical components. [0003] In the past, the surface quality of optical components mainly focused on low-frequency surface shape errors and high-frequency surface roughness, and not much attention was paid to...

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Problems solved by technology

[0007] In summary, there is no device and method for controlling the intermediate frequency error of optical components using ultrasonic vibration polishing

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