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Suspended swing arm contourgraph for ultra-large diameter surface shape detection

A swing arm profiler and surface shape detection technology, applied in the direction of instruments, measuring devices, etc., can solve the problems of reduced detection accuracy, excessive arm length, etc., and achieve the effects of improving stability, realizing detection, and reducing measurement uncertainty

Inactive Publication Date: 2015-12-30
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0010] The purpose of the present invention is to propose a suspension-type swing arm profiler for super-large-caliber surface shape detection, which solves the problem that the arm length of the swing-arm profiler in the prior art is too long to reduce the detection accuracy when measuring the surface shape of large-caliber optical elements. question

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  • Suspended swing arm contourgraph for ultra-large diameter surface shape detection
  • Suspended swing arm contourgraph for ultra-large diameter surface shape detection
  • Suspended swing arm contourgraph for ultra-large diameter surface shape detection

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Embodiment Construction

[0039] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0040] See attached image 3 , attached Figure 4 And attached Figure 5 , the suspended arm swing arm profiler for ultra-large diameter surface shape detection of the present invention includes a connecting piece A1, an air bearing turntable 2, a connecting piece B3, a measuring arm 4, a counterweight 5, a connecting piece C6 and a displacement sensor 7;

[0041] The air-floating turntable 2 is suspended and connected to the suspension device 8 through the connecting piece A1; the measuring arm 4 is fixed to the air-floating turntable 2 through the connecting piece B3; one end of the measuring arm 4 is fixed to the displacement sensor 7 through the connecting piece C6 The measuring head; the counterweight 5 is used to be fixed on the other end of the measuring arm 4 relative to the measuring head of the displacement sensor 7, so as to realize the bala...

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Abstract

The invention discloses a suspended swing arm contourgraph for ultra-large diameter surface shape detection, belongs to the technical field of optical detection and aims at solving the problem that when a swing arm contourgraph existing in the prior art is used for measuring a large-diameter optical element surface shape, the arm is too long to cause reduction of detection accuracy. The suspended swing arm contourgraph for ultra-large diameter surface shape detection comprises a suspension device, a connecting piece A, an air-borne turntable, a connecting piece B, a measuring arm, a weight balancing piece, a connecting piece C and a displacement sensor, wherein the air-borne turntable is connected with the suspension device through the connecting piece A in a suspended mode; the measuring arm is fixed to the air-borne turntable through the connecting piece B; a measuring head of the displacement sensor is fixed to one end of the measuring arm through the connecting piece C; the weight balancing piece is arranged at the other end of the measuring arm. By the adoption of the suspended swing arm contourgraph for ultra-large diameter surface shape detection, the accuracy and stability of swing arm contour detection can be improved.

Description

technical field [0001] The invention belongs to the field of surface shape detection of optical elements, and in particular relates to a suspension-type swing arm profiler for super-large-diameter surface shape detection. Background technique [0002] The processing of ultra-large-caliber optical components is generally divided into three stages: milling, grinding, and polishing; in the milling stage, the detection accuracy is controlled by the milling machine tool; in the polishing stage, the surface shape accuracy is monitored by interferometer detection; Low reflectivity and large surface shape error cannot be used for interference detection, and contour detection is usually used. Since the material removal efficiency in the polishing stage is lower than that in the grinding stage, in order to improve the processing efficiency of the mirror, improving the grinding accuracy and shortening the polishing time are effective means to improve the processing efficiency; however,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
Inventor 罗霄熊玲张峰郑立功张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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