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MEMS microphone

A microphone and side skirt technology, applied in the field of MEMS microphones, can solve problems such as difficulties and achieve the effect of simple structure and easy manufacture

Inactive Publication Date: 2016-01-13
CSMC TECH FAB2 CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But it is very difficult to control the stress of the diaphragm in such a small range, and it must be repeatable

Method used

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  • MEMS microphone
  • MEMS microphone

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Embodiment Construction

[0017] The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0018] figure 1 It is a top view of a MEMS microphone according to one embodiment of the present invention. Please combine figure 2 .

[0019] A MEMS microphone, comprising a base 100 and a diaphragm 200, the base 100 forms a support structure and is provided with a sound transmission opening 120, the diaphragm 200 spans the sound transmission opening 120, and the diaphragm 200 includes a vibrating body 220, a side skirt 240 and a membrane side 260, the vibration main body 220 is connected to the membrane edge 260 through the side skirt 240, the side skirt 240 is inclined downward at 10-80 degrees (α in the figure) relative to the plane where the main body 220 is located, and the side skirt 240 is relative to the plane where the membrane edge 260 is located An upward slope of 10°-80° (β in the figure) is provided on the surf...

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Abstract

The invention relates to an MEMS microphone, which is characterized in that a vibrating diaphragm contains a side skirt with a certain angle, and the angle of the side skirt is changed because of stress of the vibrating diaphragm. When the vibrating diaphragm is subjected to tension stress, the vibrating diaphragm contracts, and the inclination angle of the side skirt become greater, so that part of the tension stress of the vibrating diaphragm can be released; and when the vibrating diaphragm is subjected to pressure stress, the inclination angle of the side skirt become smaller, and part of the pressure stress of the vibrating diaphragm can also be released. The MEMS microphone provided by the invention is simple in structure, not much different from the existing process and easy to manufacture.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a MEMS microphone. Background technique [0002] For capacitive silicon-based MEMS microphones, the flexibility of the diaphragm determines the sensitivity of the microphone. This is because the greater the flexibility, the greater the longitudinal displacement of the diaphragm and the greater the electrical signal generated. The main factors that determine the flexibility of the diaphragm are the stress and Young's modulus of the diaphragm. Since the periphery of the diaphragm of most capacitive silicon-based MEMS microphones is connected to the substrate, the sensitivity of the microphone mainly depends on the stress of the diaphragm. In order to manufacture a microphone with high sensitivity, the diaphragm must have as little tensile stress as possible, so that the diaphragm has greater flexibility. But once the diaphragm becomes under compressive stress, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/04
Inventor 胡永刚
Owner CSMC TECH FAB2 CO LTD