A device for depositing ovd loose body and its application

Abstract

The invention provides a device for settling OVD loose bodies. The device comprises a quartziferous blow lamp and a graphite central pipe which is arranged at an outlet of the blow lamp and right faces a mandrel. A first heating device is arranged on the outer portion of the blow lamp, and a first heat preservation layer is arranged on the outer side of the first heating device. A second heating device is arranged on the outer portion of the graphite central pipe, and a second heat insulation layer is arranged on the outer side of the second heating device. A metal shell is arranged on the outer side of the second heat preservation layer, and an air inlet is formed in the metal shell. Third heating devices are arranged on the positions, close to the graphite central pipe, on the two sides of the mandrel. An inner cavity is formed in the center of the blow lamp, and a first shielding cavity, a middle cavity, a second shielding cavity and an outer cavity are formed around the inner cavity from inside to outside in sequence. According to the device, high-purity deionized water serves as a hydrolytic reactant of SiCl4, and the density of a target loose body is adjusted through reasonable temperature field control. The process stability and settling efficiency are improved, the production cost is reduced, and the production safety is improved.

Description

technical field [0001] The invention belongs to the technical field of research and development and manufacture of optical fiber preform rods, and in particular relates to a device for depositing OVD loose body and its application. Background technique [0002] The equipment body and substrate of the OVD process mainly include a deposition chamber, a flame blowtorch system, a mandrel and its rotating mechanism, etc. HCl or Cl produced by chemical reactions during preform deposition 2 It is highly corrosive, so the entire deposition process of the preform is carried out in a closed deposition chamber. In general, the two ends of the mandrel used to deposit the cladding are installed on a rotating mechanism and rotate at a certain speed, and the flame blowtorch is in the direction facing the mandrel at a certain distance and moves back and forth along the axial direction of the mandrel. sports. [0003] The reactive gas (SiCl 4 、H 2 、CH 4 , O 2 etc.) A hydrolysis or oxi...

AI Technical Summary

Problems solved by technology

[0010] a. The process stability and repeatability are poor, and different equipment needs to be equipped with different and very sensitive process parameters, which is difficult to control;

[0011] b. 40% or more raw material product SiO 2 Taken away by the combustion gas, the collection efficiency is low;

[0012] c. Most of the heat generated by the combustion gas diffuses to the reaction chamber and the surrounding environment, which consumes a lot of energy;

[0013] d. Combustion and reaction gas H 2 and O 2 The purity requirements are high, and it is flammable and explosive, which makes the production cost and management cost very high

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