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Phosphor, deep ultraviolet light-emitting device and phosphor production method

A technology of deep ultraviolet light and light-emitting devices, which is applied in the field of phosphors and can solve problems such as complex optical design

Inactive Publication Date: 2016-02-10
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, since the mercury lamp emits light at a point, when it is used in photolithography that requires uniform intensity of light over a large area, there is also a problem that complicated optical design is required.

Method used

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  • Phosphor, deep ultraviolet light-emitting device and phosphor production method
  • Phosphor, deep ultraviolet light-emitting device and phosphor production method
  • Phosphor, deep ultraviolet light-emitting device and phosphor production method

Examples

Experimental program
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Embodiment approach 1

[0043] Embodiments of phosphors will be described. The phosphor of the present invention contains fine particles of magnesium oxide containing halogen atoms, and emits deep ultraviolet light. As described in detail in the following examples, fine particles have a (420) diffraction peak in the range of a diffraction angle 2θ of 109.0° to 110.0° in powder X-ray diffraction measurement using CuKα rays. The (420) diffraction peak originates from the crystallization of magnesium oxide. According to the detailed studies of the inventors of the present invention, it has been found that the value of the Fullwidth Half Maximum (FullwidthHalfMaximum) of the (420) diffraction peak is closely related to the emission intensity of deep ultraviolet light in magnesium oxide. Specifically, it can be seen that when the full width at half maximum of the (420) diffraction peak is defined as FWHM (420), as long as the relationship of the following formula (1) is satisfied, in the phosphor contain...

Embodiment approach 2

[0062] Embodiments of a light emitting device will be described. figure 1 is a schematic group diagram showing the structure of a discharge cell as a discharge unit in the light-emitting device of the present invention. The light emitting device 101 includes a front panel 2 and a rear panel 9 . The front panel 2 includes: a front panel substrate (first substrate) 3; a plurality of scan electrodes (first electrodes) 5 and sustain electrodes (second electrodes) 4 arranged on one side of the front panel substrate 3 as a pair; a display electrode pair 6; a dielectric layer 7 covering the display electrode pair 6; and a protective layer 8. Scan electrode 5 and sustain electrode 4 include transparent electrodes 51 and 41 and bus lines 52 and 42 respectively, and they are laminated. In each display electrode pair 6, by indium tin oxide (ITO), tin oxide (SnO 2 ) and other transparent conductive materials such as strip-shaped transparent electrodes 51 and 41 are provided with bus li...

Embodiment approach 3

[0073] Other embodiments of the light emitting device will be described. figure 2 The light emitting device 102 of the present embodiment is disclosed. The light emitting device 102 includes: a plurality of discharge tubes 111 ; a flexible sheet 113 ; a reflective layer 114 provided on the flexible sheet; and a plurality of sets of electrode pairs 112X, 112Y provided on the reflective layer 114 . The discharge tube 111 has, for example, a flat oval shape on a surface perpendicular to the longitudinal direction, and has a discharge space 121 inside. The discharge space is filled with discharge gas of Xe—Ne system, Xe—He system, or the like. The frame of the discharge tube 111 is made of a material that transmits deep ultraviolet light. Specifically, the housing is made of one selected from the group consisting of quartz glass, magnesium fluoride, calcium fluoride, and lithium fluoride. Phosphor layer 123 including the phosphor of Embodiment 1 is provided inside discharge tu...

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Abstract

The invention provides a phosphor, a deep ultraviolet light-emitting device and a phosphor production method. The phosphor includes particles of halogen-containing magnesium oxide, and emits DUV light, the particles satisfying 0.16 DEG <=FWHM (420)<=0.20 DEG, wherein FWHM (420) is the full width at half maximum of a (420) diffraction peak present at a diffraction angle 2[theta] equal to or more than 109.0 DEG and equal to or less than 110.0 DEG as measured by powder X-ray diffractometry using CuK[alpha] radiation.

Description

technical field [0001] The invention relates to a phosphor emitting deep ultraviolet light, a deep ultraviolet light emitting device and a manufacturing method of the phosphor. Background technique [0002] Deep ultraviolet light with a wavelength of about 200 to 350 nm is used in various fields such as sterilization, water purification, photolithography, and lighting. Conventionally, a mercury lamp has been widely used as a light source of deep ultraviolet light. However, from the viewpoint of environmental load, for example, restrictions on environmentally harmful substances such as mercury are becoming stricter, such as European WEEE & RoHS directives. Therefore, it is desired to develop a light source that replaces the mercury lamp. In addition, since the mercury lamp emits light at a point, when it is used in photolithography or the like that requires light of uniform intensity over a large area, there is also a problem that complicated optical design is required. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K11/61H01J11/42
CPCC09K11/613H01J61/44
Inventor 辻田卓司浅野洋坂井全弘西谷干彦北川雅俊
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD