PMOS transistor repairing circuit and method

Abstract

The present invention provides a PMOS transistor repairing circuit and method. The PMOS transistor repairing circuit is suitable for providing bias voltage for a substrate of a PMOS transistor when the PMOS transistor is at a cut-off state, and the voltage value of the bias voltage is negative. The PMOS transistor repairing method comprises controlling the PMOS transistor to cut off, applying the bias voltage to the substrate of the PMOS transistor when the PMOS transistor is at the cut-off state, the voltage value of the bias voltage being negative. With adoption of the PMOS transistor repairing circuit and method, a negative bias temperature instability (NBTI) effect of the PMOS transistor can be repaired, and the service life of the PMOS transistor is prolonged.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a repair circuit and method for a PMOS transistor. Background technique [0002] As the integration level of integrated circuits is becoming higher and higher, the reliability requirements of transistors are also increasing. In a CMOS process, when evaluating the reliability of a PMOS transistor, negative bias temperature instability (NBTI, Negative Bias Temperature Instability) is a major evaluation factor. NBTI means that under the action of negative bias gate voltage and high temperature of PMOS transistor, the hydrogen-silicon bond at the interface between the gate oxide layer of the PMOS transistor and the substrate is broken, forming interface defect charges, resulting in the threshold voltage of the PMOS transistor The phenomenon of drifting with the saturation current. [0003] figure 1 is a schematic diagram of the circuit structure of the NBTI for testing PMOS...

AI Technical Summary

Problems solved by technology

[0006] With the reduction of semiconductor size, the NBTI effect of PMOS transistors is becoming more and more obvious, which seriously affects the life of PMOS transistors

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