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Herstellungsverfahren FooR Hartes Gleitelement

A technology of sliding parts and manufacturing methods, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problems such as difficulty in improving adhesion

Inactive Publication Date: 2016-03-23
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, since the ta-C film formed by AIP has very high hardness, even if an intermediate layer made of WC is interposed between the ta-C film and the substrate, it is difficult to improve the adhesion.

Method used

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  • Herstellungsverfahren FooR Hartes Gleitelement
  • Herstellungsverfahren FooR Hartes Gleitelement
  • Herstellungsverfahren FooR Hartes Gleitelement

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Embodiment Construction

[0034] Below, while referring to the attached Figure 1 Embodiments of the present invention will be described in more detail.

[0035] figure 1 A hard sliding member 20 (for example, engine parts such as pistons and cylinders, cutting tools, etc.) manufactured by this embodiment is shown. Specifically, the method of manufacturing the hard sliding member 20 is to form the carbon film 23 having a hardness higher than that of the base material 21 by AIP after surface treatment of the base material 21 (for example, formation of the base layer 22 , etc.).

[0036] The manufacturing method includes: one side into the chamber, for example figure 2 The carbon film 23 is formed in the chamber 2 by AIP while introducing a hydrocarbon gas into the chamber 2 of the film forming apparatus 1 shown, and by reducing the introduction amount of the above-mentioned hydrocarbon gas in the AIP, the carbon film 23 is controlled. 23 hardness (that is, internal stress), so that the hardness of t...

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Abstract

A manufacturing method of a hard sliding member of the present invention includes a surface treatment step of surface-treating a surface of a substrate, and a carbon film formation step of forming a carbon film on the surface of the substrate by performing arc ion plating with using a target containing carbon. In the carbon film formation step, formation of the carbon film is started by performing the arc ion plating while introducing a hydrocarbon gas, then an introduction amount of the hydrocarbon gas is reduced and the arc ion plating is continued so as to form an intermediate layer, and a surface layer made of ta-C is formed on a surface.

Description

technical field [0001] The present invention relates to a method of manufacturing a rigid sliding part. Background technique [0002] Conventionally, there is known a technique of forming a hard carbon film on the surface of a base material in order to increase the hardness of hard sliding parts such as engine parts such as pistons and cylinders. [0003] For example, in Japanese Patent Laid-Open No. 2014-122415, it is disclosed that on the surface of a base material of a hard sliding part, a carbon film having a hardness higher than that of the base material is formed as a hard carbon film by chemical vapor growth (CVD) or the like. Technology of film composed of diamond carbon (DLC). The DLC film has significantly higher hardness than the hardness of the base material, and its internal stress is also high. Therefore, when the DLC film is directly formed on the surface of the base material, the difference in hardness, that is, the difference in internal stress becomes larg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06
CPCC23C14/0605C23C14/022C23C14/025C23C14/48
Inventor 广田悟史
Owner KOBE STEEL LTD
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