Multi-wavelength multi-optical axis parallelism detection device and detection method

A detection device and parallelism technology, which is applied in the field of optical detection, can solve the problems of equipment adjustment and detection difficulty, and achieve the effect of simple structure, simple design and high measurement accuracy

Active Publication Date: 2016-03-30
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] However, due to the introduction of the femtosecond beam, the (1560nm) short-wave infrared beam is added to the instrument, and the (1560nm) short-wave infrared beam is invisible

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  • Multi-wavelength multi-optical axis parallelism detection device and detection method

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[0038] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail in conjunction with specific embodiments and with reference to the accompanying drawings.

[0039] It should be noted that all the expressions "first" and "second" in the embodiments of the invention are used to distinguish two entities with the same name but not the same or not the same parameters. It can be seen that "first" and "second" only For the convenience of presentation, it should not be understood as a limitation to the embodiments of the invention, and subsequent embodiments will not describe this one by one.

[0040] See figure 1 , Which is a schematic structural diagram of a multi-wavelength multi-optical axis parallelism detection device according to an embodiment of the present invention. As an embodiment of the present invention, the multi-wavelength multi-optical axis parallelism detection dev...

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Abstract

The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis parallelism detection device includes a first off-axis parabolic reflecting mirror, a first plane reflecting mirror, a first color division mirror, a first attenuation sheet, a second plane reflecting mirror, a third plane reflecting mirror, a first frequency multiplication crystal, a second color division mirror and a visible light photoelectric detector; the first off-axis parabolic reflecting mirror is used for reflecting a light beam to the first plane reflecting mirror; the first plane reflecting mirror is used for reflecting the light beam to the first color division mirror; and the first color division mirror is used for reflecting a short-wavelength light beam to the first attenuation sheet. With the multi-wavelength multi-optical axis parallelism detection device and detection method adopted, visible short-wavelength infrared band laser beams can be detected; and high-precision detection can be performed on multi-wavelength and multi-light beam special included angles of a femtosecond laser tracker, and obtained measurement results by adopting the multi-wavelength multi-optical axis parallelism detection device and detection method can be applied to the optical axis adjustment and error correction of the femtosecond laser tracker, and therefore, angle measurement errors among a plurality of optical axes of the femtosecond laser tracker can be improved. The device has the advantages of simple design, simple structure, high measuring accuracy, low cost and the like.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a multi-wavelength multi-optical axis parallelism detection device and a detection method of a photoelectric measurement system. Background technique [0002] With the development of photoelectric technology, the photoelectric detection system integrating target detection, tracking scanning and laser ranging has been widely used in the field of large-scale industrial measurement, such as laser range finder, photoelectric theodolite, laser tracker, etc. . [0003] The working principle of the femtosecond laser tracker: first place a reflector on the target point, the purpose of which is to return the incident laser beam in the same way; then aim the laser beam emitted by the tracker at the center of the target reflector, when the target takes When the reflector moves together, the laser beam emitted by the tracker is always aimed at the center of the target reflector to...

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Application Information

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IPC IPC(8): G01B11/26G01B11/27
CPCG01B11/26G01B11/27
Inventor 劳达宝周维虎崔成君郝春艳王国名纪荣祎董登峰张滋黎袁江刘鑫王岩庆石俊凯范百兴
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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