A catadioptric partial compensator and its design method for detecting the surface error of a convex aspheric surface
A surface error and aspheric technology, applied in the field of aspheric detection, can solve the problems of complex structure and too large compensator aperture, and achieve the effect of simplified design, optimization of light, and comprehensive and reasonable analysis.
Active Publication Date: 2018-02-09
BEIJING INSTITUTE OF TECHNOLOGYGY
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[0008] The purpose of the present invention is to solve the problem of excessively large caliber and complex structure of the partial compensator when using the partial compensator to detect the surface error of the convex aspheric surface in the prior art. On the premise of ensuring that the interference fringes can be detected, the design method is proposed to reduce the design difficulty of some compensators as much as possible
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[0041] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0042] A catadioptric partial compensator and a design method thereof for detecting convex aspheric surface shape errors are realized in the following manner:
[0043] It is known that the caliber of a certain high-order convex aspheric surface to be measured is D 0 =15.4mm, the radius of curvature of the vertex is R 0 =25.56mm, relative aperture D 0 / R 0=1:1.5, the quadratic surface coefficient is k=-1.01, the fourth, sixth, and eighth coefficients of the high-order convex aspheric surface are E=3.2703958e-06, F=7.7205335e-10, G=1.6304727e -13. The measured high-order convex aspheric surface has a relatively large aperture, and the design is as follows: figure 1 The catadioptric partial compensator shown detects its surface shape errors.
[0044] The catadioptric partial compensator includes a refractive lens and a spherical mirror wi...
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The invention relates to a refracting-reflecting partial compensator used for detecting the surface shape error of a convex aspheric surface and a design method thereof, and belongs to the technical field of aspheric surface detection. The compensator comprises a refractive lens used for partially compensating the third-order aberration of a detected convex aspheric surface, and a spherical mirror with an open center. The vertex position of the spherical mirror is approximately in the image space focal plane of the refractive lens, and the spherical mirror and the refractive lens constitute a coaxial structure. The detected convex aspheric surface and the refracting-reflecting partial compensator are coaxial. The initial structure parameters of the refracting-reflecting partial compensator in a test optical path are derived and calculated based on ray tracing and the third-order aberration theory. A piece of optical design simulation software is adopted as a design platform. The initial parameters, optimization variables, optimization goal and optimization operands of the system are set and optimized, and detection of full-aperture surface shape error of a convex aspheric mirror is realized. The method is simple, quick to operate and easy to implement. Analysis is comprehensive and reasonable. The aberration of the convex aspheric surface is well compensated, and the design difficulty of the partial compensator is simplified.
Description
technical field [0001] The invention relates to a catadioptric partial compensator for detecting convex aspheric surface shape errors and a design method thereof, belonging to the technical field of aspheric surface detection. Background technique [0002] Aspherical optical elements are an indispensable part of modern optical systems, and they are widely used in space optics, astronomical optics and military fields to correct aberrations, improve image quality, and simplify system structures. Therefore, researching a high-precision, simple and practical aspheric surface detection method has become an urgent problem to be solved in the field of aspheric surface applications. [0003] Nowadays, the interferometric detection method is one of the most widely used methods in aspheric surface shape measurement, mainly including: zero detection interferometry and non-zero detection interferometry. [0004] The zero-detection interferometry uses the longitudinal spherical aberrati...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 郝群王靖娴朱秋东胡摇
Owner BEIJING INSTITUTE OF TECHNOLOGYGY