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Totally-integrated SBC superconducting quantum interference device

A superconducting quantum interference, fully integrated technology, applied in the field of superconducting quantum interference devices (SQUID), can solve the problems of poor consistency and environmental adaptability of SBC devices.

Active Publication Date: 2013-02-27
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the SBC device has a larger flux-current transmission rate and lower noise than the conventional SQUID device, the direct-reading circuit can be used to realize the linear conversion of the flux-voltage, but the above-mentioned SBC device and the principle verification are based on the discrete SQUID components, inductors, resistors and other original components, there is poor consistency, and there are problems with the environmental adaptability of SBC devices

Method used

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  • Totally-integrated SBC superconducting quantum interference device
  • Totally-integrated SBC superconducting quantum interference device
  • Totally-integrated SBC superconducting quantum interference device

Examples

Experimental program
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Embodiment 1

[0017]According to the design requirements of the sensitivity and volume of the SBC device, complete the specific design parameters of the multi-ring structure SQUID, inductance L1 and L2, and resistance Rs, such as the number, size, critical current, inductance L1 value, inductance L2 value, and ring number of the SQUID device. The value of resistance Rs, etc., and according to the requirements of the manufacturing process, complete the photolithographic layout of the SBC device.

[0018] Compared with the traditional SQUID device, the fully integrated SBC device adds components such as inductance and resistance, but its preparation process does not increase the difficulty due to the increase of resistance and inductance components. Usually, the traditional planar thin-film SQUID device preparation process includes multi-layer micromachining preparation process, because the traditional SQUID device preparation process includes inductance preparation and resistance preparation,...

Embodiment 2

[0027] The values ​​of the inductances L1 and L2 are adjusted by different extraction points. if figure 2 The shown L1 consists of three points L1a, L1b, and L1c (actually depending on the needs, it can be adjusted by more than three points, or less than three points), depending on the actual situation. figure 2 It just means that the value of L1 can be adjusted by different lead-out points, and the same is true for L2.

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Abstract

The invention relates to the technical field of a superconducting quantum interference device (SQUID). The superconducting quantum interference device is characterized in that the SQUID in a multi-ring structure is integrated with inductance coils and resistors to constitute a totally-integrated SBC SQUID in a multi-ring structure, wherein two inductance coils are magnetically coupled with the SQUID in the multi-ring structure respectively, and another inductor is used as a feedback coil of the device; and two resistors are composed of a parallel branch resistor of the device and a heating resistor of the device. The device has the characteristics of full functions and facilitation of parameter regulation; and because the device structures are all formed by strip films, the influence of the magnetic flux creep effect is reduced, and the adaptability of the device to the working environment is improved.

Description

technical field [0001] The invention relates to a magnetic detection sensor, more precisely the invention relates to a fully integrated SBC superconducting quantum interference device. It belongs to the technical field of superconducting quantum interference device (SQUID). Background technique [0002] Superconducting quantum interference device (SQUID) is a superconducting electronic device composed of superconducting Josephson junction and superconducting ring based on the theory of magnetic flux quantization and Josephson effect. It can convert small changes in magnetic field into measurable Voltage, which is equivalent to a flux-to-voltage converter, is by far the most sensitive sensor for measuring magnetic fields. Low-temperature superconducting SQUID devices usually work at the temperature of liquid helium (4.2K), and its magnetic flux sensitivity is usually 10 -6 Φ 0 / Hz 1 / 2 magnitude (Φ 0 =2.07×10 -15 Wb), sensitivity to magnetic field in fT / Hz 1 / 2 Magnitude...

Claims

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Application Information

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IPC IPC(8): G01R33/035
Inventor 王会武荣亮亮谢晓明张懿
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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