A fully integrated sbc superconducting quantum interference device

A superconducting quantum interference and fully integrated technology, applied in the field of superconducting quantum interference devices (SQUID), can solve problems such as poor consistency and environmental adaptability of SBC devices

Active Publication Date: 2016-01-20
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Since the SBC device has a larger flux-current transmission rate and lower noise than the conventional SQUID device, the direct-reading circuit can be used to realize the linear conversion of the flux-voltage, but the above-mentioned SBC device and the principle verification are based on the discrete SQUID components, inductors, resistors and other original components, there is poor consistency, and there are problems with the environmental adaptability of SBC devices

Method used

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  • A fully integrated sbc superconducting quantum interference device
  • A fully integrated sbc superconducting quantum interference device
  • A fully integrated sbc superconducting quantum interference device

Examples

Experimental program
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Effect test

Embodiment 1

[0017] According to the design requirements of the sensitivity and volume of the SBC device, complete the specific design parameters of the multi-ring structure SQUID, inductance L1 and L2, and resistance Rs, such as the number of loops of the SQUID device, size, critical current, inductance L1 value, inductance L2 value, Resistor Rs value, etc., and complete the photolithography layout of the SBC device according to the requirements of the preparation process.

[0018] Compared with the traditional SQUID device, the fully integrated SBC device adds components such as inductors and resistors, but its preparation process does not increase the difficulty due to the increase of resistors and inductors. Under normal circumstances, the traditional planar thin film SQUID device preparation process includes a multilayer micromachining preparation process, because the traditional SQUID device preparation process includes inductor preparation and resistance preparation, so the increased in...

Embodiment 2

[0027] The values ​​of the inductances L1 and L2 are adjusted by different lead points. in case figure 2 The L1 shown consists of three points: L1a, L1b, and L1c (actually, it can be adjusted by more than three points or less than three points), depending on the actual situation. figure 2 It just means that the value of L1 can be adjusted by different lead points, and the same is true for L2.

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Abstract

The invention relates to the technical field of a superconducting quantum interference device (SQUID). The superconducting quantum interference device is characterized in that the SQUID in a multi-ring structure is integrated with inductance coils and resistors to constitute a totally-integrated SBC SQUID in a multi-ring structure, wherein two inductance coils are magnetically coupled with the SQUID in the multi-ring structure respectively, and another inductor is used as a feedback coil of the device; and two resistors are composed of a parallel branch resistor of the device and a heating resistor of the device. The device has the characteristics of full functions and facilitation of parameter regulation; and because the device structures are all formed by strip films, the influence of the magnetic flux creep effect is reduced, and the adaptability of the device to the working environment is improved.

Description

Technical field [0001] The present invention relates to a magnetic detection sensor, more specifically, the present invention relates to a fully integrated SBC superconducting quantum interference device. It belongs to the technical field of superconducting quantum interference devices (SQUID). Background technique [0002] Superconducting quantum interference device (SQUID) is a superconducting electronic device composed of superconducting Josephson junction and superconducting ring based on magnetic flux quantumization and Josephson effect. It can convert small changes in the magnetic field into measurable Voltage, equivalent to a magnetic flux-voltage converter, is by far the most sensitive sensor for measuring magnetic fields. Low-temperature superconducting SQUID devices usually work at liquid helium temperature (4.2K), and their magnetic flux sensitivity is usually 10 -6 Φ 0 / Hz 1 / 2 Magnitude (Φ 0 =2.07×10 -15 Wb), the sensitivity to magnetic field is at fT / Hz 1 / 2 Magnitud...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/035
Inventor 王会武荣亮亮谢晓明张懿
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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