Ion optical device and mass spectrometer

Abstract

The invention provides an ion optical device and a mass spectrometer. The ion optical device comprises at least one planar insulating substrate which is covered with metal patterns to form an electrode array comprising a plurality of cell electrodes, wherein the cell electrodes are arrayed along a first direction to form a geometric pattern distribution of the electrode array; the adjacent and mutually-insulated cell electrodes are applied with radio frequency voltages having different phases to confine ions; a direct current voltage difference is applied between at least part of the cell electrodes in the electrode array to drive ions, which enter an electric field generated by the electrode array, to move in the first direction along the electrode array; and a corresponding electric field distribution is formed by means of the geometric pattern distribution to drive the incident ions to move in a second direction substantially orthogonal to the first direction, thereby realizing ion deflection, focusing or defocusing. Various desired spatial electric field distributions are formed by means of the geometric structure and distribution of the planar electrodes; and in implementation, cell electrodes in various planar geometrical shapes are printed by adopting a PCB or MEMS process, and the ion optical device has the advantages of low cost, high precision, high flexibility and the like.

Description

technical field [0001] The invention relates to the technical field of mass spectrometry, in particular to an ion optical device and a mass spectrometer for a mass spectrometer. Background technique [0002] Ion optics are primarily used in mass spectrometers as ion transport or guide devices to guide ions generated from an ion source into a mass analyzer. Ion optical devices in the form of electrode arrays, such as US patents US6107628, US8581181, and Chinese patent CN201210203634, have been widely used in the industry due to their design and functional flexibility. [0003] At present, the manufacturing method of the electrode array is mainly to directly manufacture discrete pure gold flexor electrode devices, and then use fixtures to position and fix them. The advantages of making pure gold flexor electrodes are that the processing precision can be very high, which is easy to meet the needs of ion optical devices, and the second is that the device itself has no insulatin...

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Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide an ion optical device used in a mass spectrometer to solve the problem that the electrode array in the prior art is difficult to achieve a more complex potential distribution, or even if it can be realized, the structure Technical problems such as complex processing difficulties

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