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Fully automatic cleaning device and cleaning process for silicon wafer inserts

A technology of automatic cleaning and silicon wafer insertion, applied in transportation and packaging, conveyor objects, electrical components, etc., can solve the problems of low degree of automation and manual placement, saving labor, high level of automation, and convenient equipment maintenance effect

Active Publication Date: 2018-01-12
TIANJIN ZHONGHUAN SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current cleaning machine is not highly automated, requiring manual placement of baskets and loading

Method used

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  • Fully automatic cleaning device and cleaning process for silicon wafer inserts
  • Fully automatic cleaning device and cleaning process for silicon wafer inserts

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] like figure 1 , 2 As shown, the silicon wafer inserting automatic cleaning device includes inserting machine 1, washing machine feeding device 2, washing machine 3, dryer 4, sorting machine 5, wafer basket return line 6, inserting machine 1, The washing machine feeding device 2, washing machine 3, dryer 4, and sorting machine 5 are placed in sequence and fixed together with bolts. 3. The feeding area extends into the washing machine feeding device 2 and connects with the discharge guide rail of the washing machine feeding device 2. The final cleaning tank of the washing machine 3 is connected with the material inlet of the dryer 4. The outlet of the dryer 4 is connected with the sorting The conveyor line at the front end of the machine 5 is connected, and the chip basket return line 6 is fixed on the side of the cleaning device from the outlet of the sorting machine 5 through the feeding device 2 of the cleaning machine to the inserting machine 1, and the inserting mac...

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PUM

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Abstract

The invention relates to an inserting and full-automatic cleaning device and a cleaning technological process for silicon wafers. The inserting and full-automatic cleaning device comprises an inserting machine, a cleaning machine feeding device, a cleaning machine, a drying machine, a sorting machine and a wafer basket return line, wherein the inserting machine, the cleaning machine feeding device, the cleaning machine, the drying machine and the sorting machine are placed in sequence and are mutually fixed together with bolts; a material fetching mechanism of the cleaning machine feeding device is connected with an inserting table of the inserting machine; a cleaning machine feeding area stretches into the cleaning machine feeding device to be connected with discharging guide rails of the cleaning machine feeding device; a final cleaning groove of the cleaning machine is connected with a feeding inlet of the drying machine; an outlet of the drying machine is connected with a conveying line at the front end of the sorting machine; and the wafer basket return line goes to the inserting machine through the cleaning machine feeding device from a discharge opening of the sorting machine and is fixed to one side of the cleaning device. The inserting and full-automatic and cleaning device has the beneficial effects that the automation level is high, the work efficiency is improved, the manpower is saved, equipment is independently controlled, the operational reliability of the whole machine is improved and the equipment maintenance is facilitated.

Description

technical field [0001] The invention relates to a silicon chip insertion cleaning device, in particular to a silicon chip insertion automatic cleaning device and a cleaning process flow. Background technique [0002] Silicon wafers must be strictly cleaned in the production of semiconductor devices. Trace contamination can also lead to device failure. The purpose of cleaning is to remove surface contamination impurities, including organic and inorganic substances. Some of these impurities exist in the form of atoms or ions, and some exist on the surface of silicon wafers in the form of thin films or particles. The current cleaning machine is not highly automated, requiring manual placement and loading of the basket. Contents of the invention [0003] In view of the problems existing in the prior art, the present invention provides a fully automatic cleaning device for inserting silicon wafers, which can be automatically improved through inserting, feeding, and cleaning t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67023H01L21/67034H01L21/67706H01L21/67742
Inventor 靳立辉张学强郑全午李伦周晓英
Owner TIANJIN ZHONGHUAN SEMICON CO LTD