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Water-floating type ultra-thin glass substrate measuring platform

A technology of ultra-thin glass and measurement platform, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of large area, warpage deformation, and inability to accurately reflect the value of warpage parameters, so as to achieve accurate warpage parameters, Reduces the effect of warping

Inactive Publication Date: 2016-05-11
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Accurate measurement of ultra-thin glass substrates is an industrial problem, because it is large in size, extremely thin, and easily deformed and broken
If the ultra-thin glass itself has a certain warping deformation, place it on a high-flatness horizontal measuring platform, the lower concave surface will be in contact with the measuring platform surface, the upper convex surface will be suspended in the air, and the contact part between the lower concave surface and the measuring platform will bear the glass All the weight of the glass will cause artificial warping deformation during glass measurement, and cannot accurately reflect the warpage parameter value of the ultra-thin glass substrate under natural stress

Method used

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  • Water-floating type ultra-thin glass substrate measuring platform
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  • Water-floating type ultra-thin glass substrate measuring platform

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with accompanying drawing.

[0017] Such as figure 1 , figure 2 and image 3 As shown, a water-floating ultra-thin glass substrate measuring platform includes a measuring mechanism, a water-floating supporting mechanism and a glass carrying lifting mechanism; the measuring mechanism includes a base 2, and four Pillar 1, four pillars 1 support the entire measurement platform, above the base 2 is the structure of the gantry type coordinate measuring machine, specifically including the X-axis slide plate 13 driven by the motor 4 on the side of the base 2, the Y-axis beam 18, the Z Axis slide 15 and Z-axis slide 15 are equipped with spectral focusing probe 14, and the three motion axes all adopt air bearings, which have high motion accuracy;

[0018] The water-floating support mechanism includes a water tank 6 arranged on the top of the base 2, and a floating block spacer 8 is arranged inside the water...

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Abstract

The invention provides a water-floating type ultra-thin glass substrate measuring platform which comprises a measuring mechanism, a water-floating supporting mechanism and a glass carrying and lifting mechanism. The water-floating supporting mechanism and the glass carrying and lifting mechanism are matched with the measuring mechanism. The buoyancy characteristic of water is utilized for supporting array floating blocks. The effect that all parts of the plane of the ultra-thin glass substrate can be effectively supported is ensured, man-made buckling deformation caused by unreasonable supporting in the ultra-thin glass measuring process is effectively reduced, it is ensured that the ultra-thin glass is in a natural stress state to the greatest extent when measured, and buckling parameters of the ultra-thin glass substrate can be evaluated more accurately.

Description

technical field [0001] The invention relates to the technical field of ultra-thin glass measurement, in particular to a water-floating ultra-thin glass substrate measurement platform. Background technique [0002] With the development of the electronics industry, flat panel display products are increasingly showing amazing growth potential. As the upstream product of the flat panel display industry chain, the demand for TFT-LCD ultra-thin glass substrates is particularly huge. In the production line of ultra-thin glass substrates, quality control is an indispensable part, and its main measurement parameters are glass thickness and warpage, which are also the main process parameters in the production process of ultra-thin glass substrates. [0003] Accurate measurement of ultra-thin glass substrates is an industrial problem, because it is large in size, extremely thin, and easily deformed and broken. If the ultra-thin glass itself has a certain warping deformation, place it...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/02
CPCG01N3/02
Inventor 李海涛郭俊杰杜红枫何欣荣邓玉芬任东旭王兴
Owner XI AN JIAOTONG UNIV
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