High-sensitivity piezo-resistive-capacitance superimposed force-sensitive sensor based on synchronous resonance

Abstract

The invention relates to a synchronous resonance-based high-sensitivity voltage, resistance and capacitance superposition force sensor and belongs to the field of synchronous resonance cantilever force sensors capable of realizing voltage, resistance and capacitance superposition. The lower part of a C-shaped supporting structure is fixedly connected with a piezoelectric excitation structure; the middle part of the C-shaped supporting structure is connected with a U-shaped beam, a T-shaped beam and a synchronous coupling beam; two sides of the T-shaped beam is connected with the synchronous coupling beam; the inner side of the U-shaped beam is connected with the synchronous coupling beam; a plurality of piezoelectric vibration pick-up structures are deposited on the surface of the T-shaped beam; the surface of the fixed end of the T-shaped beam is provided with a piezoresistance vibration pick-up structure; and two capacitance vibration pick-up structures form a differential capacitance vibration pick-up structure. The force sensor of the invention is novel in structure. Based on simple structure design, the piezoelectric, piezoresistance and capacitance vibration pick-up structures are integrated in the same structure, the output signals of the three structures are superposed, and therefore, output voltage can be further amplified, and the detection sensitivity of the sensor can be improved.

Description

technical field [0001] The invention relates to a synchronous resonant cantilever beam force sensitive sensor capable of superimposing piezoelectricity, piezoresistance and capacitance. Background technique [0002] In recent years, force sensitive sensors have been widely used in environmental detection, industrial production, food safety and other aspects as the main means of detecting the quality of substances and the magnitude of force. Resonant sensor devices are small in size and high in resonance frequency, so they have high sensitivity, such as resonant gas sensors. As the most classic and compact structure in microsystems, cantilever beams are sensitive to mass changes and easy to microfabricate. The resonant cantilever beam type force sensor uses the specific adsorption substance molecules of the mass-sensitive film to convert the mass change of the beam into the shift of the resonance frequency, obtain the shift amount and output it through an electrical signal, ...

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