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33results about How to "Increase the output capacitance" patented technology

Synchronous resonance-based high-sensitivity voltage, resistance and capacitance superposition force sensor

ActiveCN105628264ANovel structureAchieve frequency doublingForce measurementPhysicsCoupling beam
The invention relates to a synchronous resonance-based high-sensitivity voltage, resistance and capacitance superposition force sensor and belongs to the field of synchronous resonance cantilever force sensors capable of realizing voltage, resistance and capacitance superposition. The lower part of a C-shaped supporting structure is fixedly connected with a piezoelectric excitation structure; the middle part of the C-shaped supporting structure is connected with a U-shaped beam, a T-shaped beam and a synchronous coupling beam; two sides of the T-shaped beam is connected with the synchronous coupling beam; the inner side of the U-shaped beam is connected with the synchronous coupling beam; a plurality of piezoelectric vibration pick-up structures are deposited on the surface of the T-shaped beam; the surface of the fixed end of the T-shaped beam is provided with a piezoresistance vibration pick-up structure; and two capacitance vibration pick-up structures form a differential capacitance vibration pick-up structure. The force sensor of the invention is novel in structure. Based on simple structure design, the piezoelectric, piezoresistance and capacitance vibration pick-up structures are integrated in the same structure, the output signals of the three structures are superposed, and therefore, output voltage can be further amplified, and the detection sensitivity of the sensor can be improved.
Owner:JILIN UNIV

Shield gate trench MOSFET

PendingCN111223930ADoes not take up additional spaceIncrease the output capacitanceSemiconductor devicesCapacitanceTrench mosfet
The invention discloses a shield gate trench metal oxide semiconductor field effect transistor (MOSFET). The structure comprises a primitive cell region and a peripheral region, a device unit structure of a shield gate trench MOSFET is formed in the primitive cell region, a trench MOS capacitor used for reducing nonlinearity of output capacitance of the shield gate trench MOSFET is formed in the peripheral region, and the trench MOS capacitor comprises a second gate structure which is formed in a second trench and comprises a second polycrystalline silicon shield field plate, wherein the second trench is formed in a first epitaxial layer doped with the first conductivity type, and a second shielding dielectric layer is isolated between the second polycrystalline silicon shielding field plate and the first epitaxial layer, the source region is not formed on the surface of the first epitaxial layer covered on the side surface of the second trench, and the first epitaxial layer on the side surface of the second trench and the first epitaxial layer of the primitive cell region form the drift region of the whole device; the drain region of the whole device is formed at the bottom of thefirst epitaxial layer; and the top of the second polycrystalline silicon shielding field plate is connected to the source electrode through a contact hole. According to the invention, the minimum value of the output capacitance can be improved, and the nonlinearity of the output capacitance is improved.
Owner:SHENZHEN SANRISE TECH CO LTD

Trench MOSFET and manufacturing method thereof

The invention discloses a trench metal oxide semiconductor field effect transistor (MOSFET). The structure comprises a primitive cell region and a peripheral region, wherein a device unit structure ofa trench MOSFET is formed in the primitive cell region, a trench MOS capacitor used for reducing the nonlinearity of the output capacitance of the trench MOSFET is formed in the peripheral region, and the trench MOS capacitor comprises a second trench gate formed by superposing a second gate dielectric layer and a second polysilicon gate which are formed in a second trench; a source region is notformed on the surface of the first epitaxial layer covered on the side surface of the second polysilicon gate, a drift region formed by the first epitaxial layer extends into the whole primitive cellregion and the peripheral region, and a drain region is formed on the back surface of the drift region; the top of the second polysilicon gate is connected to the source electrode through a contact hole; the trench MOS capacitor and the device unit structure form a parallel structure, and the output capacitance of the whole trench MOSFET is improved and the nonlinearity of the output capacitanceis reduced when the device is reversely biased. The invention further discloses a manufacturing method of the trench MOSFET.
Owner:SHENZHEN SANRISE TECH CO LTD

Anti-EMI super-junction VDMOS device and preparation method thereof

The invention provides an anti-EMI super-junction VDMOS device and a preparation method thereof. The device is provided with a composite dielectric layer consisting of an oxide layer (SiO2), a semi-insulating polycrystalline silicon layer (SIPOS) and an oxide layer (SiO2) in a super-junction drift region, wherein the oxide layer isolates a drift region from the SIPOS layer, the lower portion of the SIPOS layer is connected with the device drain electrode metal, and the upper portion of the SIPOS layer is connected with the device source electrode metal. When the device is in a turn-off state, the composite dielectric layer assists in depletion of the super junction drift region, so that the doping concentration of the drift region can be greatly improved, and the phenomenon that the withstand voltage is reduced due to mismatch between a super junction P column and an N column can be relieved; and in the switching process of the device, because the SIPOS is directly connected with the source electrode and the drain electrode of the device, the output capacitance Coss of the device is greatly improved, the switching oscillation is reduced, and thus the voltage oscillation dV/dt failure possibility and the EMI noise of the device are reduced.
Owner:济南市半导体元件实验所

Fabrication method of rfldmos device

The invention discloses a manufacturing method of an RFLDMOS (radio frequency laterally diffused metal oxide semiconductor) device. The manufacturing method comprises steps as follows: a P-type epitaxial layer is formed on a silicon substrate; a first liner oxide layer and a second silicon nitride layer are sequentially formed; a forming region of a thick field oxide layer is defined, and a hard mask layer in the region is removed; multiple deep grooves are formed in the forming region of the thick field oxide layer; third thermal oxidation layers are formed in the forming region of the thick field oxide layer; fourth polycrystalline silicon layers are deposited, the deep grooves are completely filled with the fourth polycrystalline silicon layers, and an etch-back process is performed; a forming region of a fishbone gate is defined, and a hard mask layer in the region is removed; thermal oxidation is performed, fourth thermal oxidation layers are formed at the tops of the fourth polycrystalline silicon layers and a fifth thermal oxidation layer is formed in the forming region of the fishbone region; CMP (chemical mechanical polishing) flattening is performed; a gate oxide layer and a polysilicon gate are sequentially formed; a P well, an N-type drift region, a source region, a drain region and a P-well extraction region are formed. The manufacturing method enables a manufacturing process of the liner oxide layer under the fishbone gate to be simple and reduces the process cost.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

High-sensitivity piezo-resistive-capacitance superimposed force-sensitive sensor based on synchronous resonance

ActiveCN105628264BSuperimposed output voltage maximizationNovel structureForce measurementCapacitanceElectricity
The invention relates to a synchronous resonance-based high-sensitivity voltage, resistance and capacitance superposition force sensor and belongs to the field of synchronous resonance cantilever force sensors capable of realizing voltage, resistance and capacitance superposition. The lower part of a C-shaped supporting structure is fixedly connected with a piezoelectric excitation structure; the middle part of the C-shaped supporting structure is connected with a U-shaped beam, a T-shaped beam and a synchronous coupling beam; two sides of the T-shaped beam is connected with the synchronous coupling beam; the inner side of the U-shaped beam is connected with the synchronous coupling beam; a plurality of piezoelectric vibration pick-up structures are deposited on the surface of the T-shaped beam; the surface of the fixed end of the T-shaped beam is provided with a piezoresistance vibration pick-up structure; and two capacitance vibration pick-up structures form a differential capacitance vibration pick-up structure. The force sensor of the invention is novel in structure. Based on simple structure design, the piezoelectric, piezoresistance and capacitance vibration pick-up structures are integrated in the same structure, the output signals of the three structures are superposed, and therefore, output voltage can be further amplified, and the detection sensitivity of the sensor can be improved.
Owner:JILIN UNIV

A double-tube flexible capacitive liquid level sensor and its measurement method

The invention provides a double-tube flexible capacitive liquid level sensor and a measuring method thereof. The double-tube flexible capacitive liquid level sensor is provided with a single-stranded insulating copper core wire, two cylinders, end plates, cable head clamping assemblies, a spring and signal outgoing cables. The two cylinders are installed side by side at the same height, and the two end plates are installed at the two ends of the cylinders respectively and used for fixing the cable head clamping assemblies. The spring is placed between the two cylinders, and the spring is fixed to the end plates at the upper ends of the cylinders. The single-stranded insulating copper core wire penetrates through the two cylinders in a U shape and is fixed through the cable head clamping assemblies to serve as a metal electrode. The cylinders or a conducting medium serves as another electrode. The signal outgoing cables are arranged on the side walls of the first cylinder and the second cylinder. The double-tube flexible capacitive liquid level sensor is simultaneously suitable for measuring the liquid levels of the conducting medium, a non-conducting medium and different kinds of liquid, the measuring range can be adjusted according to the practical working condition, and the advantages that output capacitance is large, measuring precision is high, and the measuring range is convenient to adjust are achieved.
Owner:BEIJING RES INST OF TELEMETRY +1
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