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Roll-to-roll magnetron sputtering vacuum coating device

A technology of magnetron sputtering and vacuum coating, which is applied in the directions of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problems of poor film quality and low coating efficiency, so as to improve uniformity, The effect of local pressure stabilization

Inactive Publication Date: 2016-06-15
CHENGDU CVAC VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] The present invention provides a roll-to-roll magnetron sputtering vacuum coating device to solve the technical problems of poor film quality and low coating efficiency of existing coating equipment

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  • Roll-to-roll magnetron sputtering vacuum coating device

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Embodiment Construction

[0043] In order to enable those skilled in the technical field to which the application belongs to understand the application more clearly, the technical solutions of the application will be described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0044] see figure 1 , in an embodiment of the present invention, a roll-to-roll magnetron sputtering vacuum coating device is provided.

[0045] Such as figure 1 As shown, the device provided by the present invention includes: a vacuum chamber, an unwinding roller 1 , a cooling roller 4 , and a winding roller 3 .

[0046] The vacuum chamber is mainly used for coating work, and the unwinding roller 1, the cooling roller 4, and the winding roller 3 are inside the vacuum chamber.

[0047] In order to prevent sputtering from polluting the substrate to be coated, the embodiment of the present invention utilizes the isolation plate 6 to divide the vacuum chamber into two parts. For ease of ...

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Abstract

The invention discloses a roll-to-roll magnetron sputtering vacuum coating device. The roll-to-roll magnetron sputtering vacuum coating device comprises a vacuum cavity, wherein an unreeling roll, a cooling roll, a reeling roll and a positioning support are sequentially arranged in the vacuum cavity; the positioning support is a height-adjustable concave type support and comprises a supporting mechanism and a recessed mechanism; the distance between the recessed mechanism and a cooling roll can be adjusted randomly by the supporting mechanism so as to randomly change a target-substrate distance; a plurality of sputtering cathodes are arranged on a recessed surface of the recessed mechanism; each sputtering cathode is provided with a corresponding sputtering target; and the sputtering targets in the sputtering cathodes can be the same or different. The sputtering cathodes are placed in a vacuum cavity, the distance between the recessed mechanism and the cooling roll is adjusted by the height-adjustable concave support, so that the optimal coating distance of a substrate to be coated on the sputtering targets and the cooling roll can be found out, deposition rate can be increased greatly, and sputtering coating efficiency and coating quality are improved.

Description

technical field [0001] The present application relates to the technical field of vacuum roll-to-roll coating, in particular to a roll-to-roll magnetron sputtering vacuum coating device. Background technique [0002] With the advancement of science and technology and the demand of the market, the coating flexible roll material has been developed rapidly, which has also promoted the rapid development of coating technology and coating machines. [0003] Vacuum roll coating technology is a technology that prepares one or more layers of thin films with certain functions on the surface of coil substrates by thermal evaporation or magnetron sputtering in a vacuum chamber. It mainly has the following characteristics: The material is a flexible substrate, which can be wound; continuous coating is possible, that is, the coating is carried out continuously within a working cycle; in addition, the coating environment is a high vacuum environment. [0004] During the unwinding and windi...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/56
CPCC23C14/35C23C14/562
Inventor 向勇傅绍英胡杨杨小军
Owner CHENGDU CVAC VACUUM TECH CO LTD