A molecular pump and its control method

Abstract

The invention discloses a molecular pump which comprises a process parameter input unit for inputting a process parameter requirement on a current procedure, an equipment control and analysis system for receiving input information of the process parameter input unit, selecting a rotating speed of a rotating vane of the molecular pump according to an air extraction efficiency characteristic curve of the molecular pump and generating a corresponding rotating speed control instruction, a molecular pump controller for receiving the rotating speed control instruction output by the equipment control and analysis system and adjusting power input into a vane rotating driving device through a PID adjuster to adjust the rotating speed of the rotating vane of the molecular pump, and a rotating speed feedback unit for feeding the rotating speed of the rotating vane of the molecular pump in real time to the equipment control and analysis system to match the air extraction efficiency of the molecular pump with the process requirement of the current procedure. The molecular pump can adjust the rotating speed of the rotating vane of the molecular pump in real time according to the process parameter requirement of the current procedure to improve the controllability and uniformity of the air extraction efficiency; and furthermore, the energy consumption is reduced, energy is saved, and emission is reduced.

Description

Technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a molecular pump and a control method thereof. Background technique [0002] Semiconductor manufacturing requires specific physical and chemical reaction processes in a certain vacuum environment. The acquisition and maintenance of higher vacuum requires the use of molecular pumps. Molecular pumps are widely used in semiconductor manufacturing processes due to their high pumping efficiency and stable operation. [0003] In the existing molecular pump working mode, the blade speed is maintained at the highest speed, and the upper-stage swing valve is adjusted to achieve pressure control under different process conditions. Obviously, the above-mentioned molecular pump has the highest energy consumption in the working mode. At the same time, because the pumping efficiency of the molecular pump cannot be fully utilized, the upper-stage swing valve is often in a partiall...

AI Technical Summary

Problems solved by technology

[0006] The present invention is aimed at the defects in the prior art that the traditional molecular pump has the highest energy consumption in the working mode, and affects the uniformity of the pumping efficiency in the reaction chamber, which in turn greatly affects the uniformity of product manufacturing. a molecular pump

[0007] The second purpose of the present invention is to aim at the prior art, the traditional molecular pump has the highest energy consumption under the working mode, and affects the uniformity of the pumping efficiency in the reaction chamber, thereby causing a great degree of harm to the uniformity of product manufacturing. Effects and other defects provide a method for the control of molecular pumps

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