The utility model relates to the technical field of
semiconductor processing equipment, concretely relates to a grid device and
ion source equipment. The grid device includes conducting
assembly, screen grid, acceleration grid, deceleration grid and grid mounting plate, screen grid, acceleration grid and deceleration grid are sequentially laminated and mutually spaced insulation settings, and all are installed in the open end of external
ion source shell through grid mounting plate, screen grid, acceleration grid and deceleration grid all are insulated with grid mounting plate setting, and deceleration grid is close to grid mounting plate setting and is electrically connected with external current detection module through conducting
assembly to output the current for detecting. The application is through the insulation setting of screen grid, acceleration grid, deceleration grid with grid mounting plate, and adds conducting
assembly, and deceleration grid can be electrically connected with external current detection module through conducting assembly, and the current of deceleration grid is detected, so that the performance of
ion source is more accurately evaluated, and the increasingly higher process requirement and stability requirement are satisfied.