Decoupling control method of multi-freedom precision positioning platform
A technology of precise positioning and decoupling control, which is applied in the direction of adaptive control, general control system, control/regulation system, etc., can solve the problems of high economic cost and achieve the effects of improving positioning accuracy, saving economic cost and reducing difficulty
Inactive Publication Date: 2016-06-15
NANJING UNIV OF SCI & TECH +1
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Problems solved by technology
This decoupling method requires high machining accuracy during manufacturing, and needs to replace the hardware and replace the original precision positioning platform, so the economic cost is also high
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[0062] The input of piezoelectric-driven two-degree-of-freedom precision positioning platform is voltage, and the output is displacement. Ideally, the motion directions of the two degrees of freedom are orthogonal to each other, but due to the influence of the structure itself and the machining accuracy, there is a coupling effect of mutual interference between the two degrees of freedom. The steps of the decoupling control method are as follows:
[0063] (1) Keeping the input voltage of the second degree of freedom unchanged, the input voltage applied to the first degree of freedom is as follows image 3 As shown in , the input voltage and output displacement of the first degree of freedom are recorded by the data acquisition device.
[0064] (2) Keeping the input voltage of the first degree of freedom unchanged, the input voltage applied to the second degree of freedom is as follows image 3 As shown, the input voltage and output displacement values of the second degree ...
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The invention discloses a decoupling control method of a multi-freedom precision positioning platform. Through the response of each test platform, a mathematics model and a coupling mathematics model of each freedom are respectively established. A decoupling control system is designed based on the mathematics model and the coupling mathematics model of each freedom. In the real-time control, when the input changes, the displacement variation caused by the coupling effect on each freedom is calculated according to the coupling mathematics model. According to the calculated displacement variation and each freedom mathematics model, a modified input value of each freedom is calculated in order, and the input value acts on each freedom of the platform, so that output change caused by the modified input value and output change caused by the coupling effect are counteracted. The decoupling control method of the multi-freedom precision positioning platform can be directly applied to the current multi-freedom precision positioning platform, and can be used for decoupling the multi-freedom precision positioning platform and improving the positioning precision by only updating a corresponding controller algorithm without re-designing or manufacturing new devices.
Description
technical field [0001] The invention belongs to the field of automatic control, in particular to a decoupling control method of a multi-degree-of-freedom precision positioning platform. Background technique [0002] The multi-degree-of-freedom precision positioning platform can cooperate with other instruments and equipment to complete high-precision tasks, and it is playing an increasingly important role in the fields of microelectronics, micromedicine, nanotechnology, and bioengineering. High-precision positioning platforms usually use smart materials as drivers, such as piezoelectric ceramics and magnetostrictive materials, and flexible hinges as motion pairs. With the development of science and technology, especially in the fields of microelectronics products and precision machining, higher and higher requirements are put forward for the positioning accuracy of the platform. However, the problem of mechanical structure and machining accuracy, and the coupling effect bet...
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IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 陈远晟裘进浩罗富许友伟吴军基
Owner NANJING UNIV OF SCI & TECH