A production equipment for large-area flexible magnetic films with adjustable magnetic anisotropy
A magnetic anisotropy and magnetic thin film technology, which is applied in the field of large-area flexible magnetic thin film production equipment, can solve the problems of difficult control, poor regulation effect, unfavorable magnetic anisotropy regulation and large-area thin film production, etc., and achieve production efficiency High, cost-reducing effects
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0037] In this implementation, the flexible magnetic material is polyimide substrate / cobalt iron boron / tantalum, that is, polyimide is used as a flexible substrate, and a cobalt iron boron film is deposited on the surface of the substrate, and the surface of the cobalt iron boron film is a tantalum protective layer , taking the flexible magnetic material as an example, the following test is carried out.
[0038] The flexible magnetic material is placed in the figure 1 The surface of the mold shown is used to apply stress to the flexible magnetic material. Under the stress, the magnetic film will exhibit a magnetic anisotropy field. By changing the radius of curvature of the mold to change the magnitude of the stress, the calculation formula of the strain magnitude coefficient ε and stress σ is:
[0039] ε=ΔS / S=t / 2R+t (1)
[0040] σ=εE f / (1-v 2 ) (2)
[0041] where R is the radius of curvature of the mold, t is the total thickness of the substrate and film, E f is Young'...
Embodiment 2
[0048] The structure of the production equipment of magnetic anisotropic flexible magnetic film is as follows Figure 9 As shown, it includes a vacuum coating chamber 1 , a coating device 2 , a film conveying device and a stress adjustment rotor 12 .
[0049] The film conveying device includes an unwinding roller 6 , a first guide roller 9 and a second guide roller 13 . The unwinding roller 6 is located in the unwinding chamber 5 , and the unwinding chamber 5 is located on one side of the vacuum coating chamber 1 . The other side of the vacuum coating chamber 1 is provided with a winding chamber 14 .
[0050] The vacuum coating chamber 1 is also provided with an air inlet channel 4 and an air outlet channel 15 . The intake passage is provided with an intake valve, which is used to control the opening and closing of the intake passage. The air outlet channel is provided with an air outlet valve for controlling the opening and closing of the air outlet channel.
[0051] The ...
PUM
| Property | Measurement | Unit |
|---|---|---|
| diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


