Unlock instant, AI-driven research and patent intelligence for your innovation.

A production equipment for large-area flexible magnetic films with adjustable magnetic anisotropy

A magnetic anisotropy and magnetic thin film technology, which is applied in the field of large-area flexible magnetic thin film production equipment, can solve the problems of difficult control, poor regulation effect, unfavorable magnetic anisotropy regulation and large-area thin film production, etc., and achieve production efficiency High, cost-reducing effects

Active Publication Date: 2017-12-12
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] At present, the main method of fabricating magnetic thin films with large magnetic anisotropy field is through magnetic field induction or magnetic field annealing, but applying a magnetic field not only increases the production cost, but also brings a lot of inconvenience, and is not conducive to the regulation of magnetic anisotropy and large-area film production
Some scientific and technological documents, such as: JAP, 81 (8): 4519 (1997) etc., report that the adjustment and control of the magnetic anisotropy of the film is realized by stress, but the substrates used therein are generally rigid substrates, and the stress is not easy to obtain. , It is not easy to control, and the control effect is poor, and it is impossible to realize the production of large-area thin films, so it is impossible to realize industrialization

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A production equipment for large-area flexible magnetic films with adjustable magnetic anisotropy
  • A production equipment for large-area flexible magnetic films with adjustable magnetic anisotropy
  • A production equipment for large-area flexible magnetic films with adjustable magnetic anisotropy

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] In this implementation, the flexible magnetic material is polyimide substrate / cobalt iron boron / tantalum, that is, polyimide is used as a flexible substrate, and a cobalt iron boron film is deposited on the surface of the substrate, and the surface of the cobalt iron boron film is a tantalum protective layer , taking the flexible magnetic material as an example, the following test is carried out.

[0038] The flexible magnetic material is placed in the figure 1 The surface of the mold shown is used to apply stress to the flexible magnetic material. Under the stress, the magnetic film will exhibit a magnetic anisotropy field. By changing the radius of curvature of the mold to change the magnitude of the stress, the calculation formula of the strain magnitude coefficient ε and stress σ is:

[0039] ε=ΔS / S=t / 2R+t (1)

[0040] σ=εE f / (1-v 2 ) (2)

[0041] where R is the radius of curvature of the mold, t is the total thickness of the substrate and film, E f is Young'...

Embodiment 2

[0048] The structure of the production equipment of magnetic anisotropic flexible magnetic film is as follows Figure 9 As shown, it includes a vacuum coating chamber 1 , a coating device 2 , a film conveying device and a stress adjustment rotor 12 .

[0049] The film conveying device includes an unwinding roller 6 , a first guide roller 9 and a second guide roller 13 . The unwinding roller 6 is located in the unwinding chamber 5 , and the unwinding chamber 5 is located on one side of the vacuum coating chamber 1 . The other side of the vacuum coating chamber 1 is provided with a winding chamber 14 .

[0050] The vacuum coating chamber 1 is also provided with an air inlet channel 4 and an air outlet channel 15 . The intake passage is provided with an intake valve, which is used to control the opening and closing of the intake passage. The air outlet channel is provided with an air outlet valve for controlling the opening and closing of the air outlet channel.

[0051] The ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
diameteraaaaaaaaaa
Login to View More

Abstract

The invention provides a large-area flexible magnetic film manufacturing equipment with adjustable magnetic anisotropy. The equipment includes a vacuum coating chamber, a coating device, a film conveying device and a stress adjustment rotor; in working state, the flexible substrate is conveyed in the vacuum coating chamber through the film conveying device, and is in contact with the stress regulating rotor during the conveying process. The stress is applied, and the magnetic thin film is coated on the surface of the flexible substrate under the stress by the coating device. The process of making flexible magnetic films by using this equipment is simple and easy, no external magnetic field is required, the cost is greatly reduced, and the production efficiency is high. Flexible magnetic films can be produced in large areas. The prepared flexible magnetic films not only have large magnetic anisotropy, Moreover, its thickness and magnetic anisotropy field can be adjusted.

Description

technical field [0001] The invention belongs to the technical field of flexible magnetic thin film materials, and in particular relates to a large-area flexible magnetic thin film manufacturing equipment with adjustable magnetic anisotropy. Background technique [0002] Flexible electronic technology refers to the emerging electronic technology that manufactures electronic devices of organic / inorganic materials on flexible / extensible substrates, such as plastics and ultra-thin metals. Different from electronic devices fabricated on rigid substrates, such as silicon substrates, using traditional semiconductor technology, flexible electronic devices have unique flexibility / ductility and have the advantages of low manufacturing cost and high efficiency. It has important application prospects in fields such as medical, national defense, etc., which has attracted widespread attention in the world and has developed rapidly. [0003] Considering the small Young's modulus, easy def...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01F41/14
Inventor 王保敏唐振华李润伟刘宜伟乔新玉孙丹丹夏立祥
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI