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Superconducting circuit structure with step region covered with superconducting cladding layer and preparation method thereof

A technology of area coverage and circuit structure, applied in the manufacture/processing of superconductor devices, superconducting devices, circuits, etc., can solve the problems of Josephson junction stability, poor stability of superconducting circuit structure performance, etc., to improve performance and stability, improve work performance, and avoid damage

Active Publication Date: 2018-09-07
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a superconducting circuit structure with a superconducting covering layer on the stepped area and its preparation method, which is used to solve the problem in the prior art due to the formation of shunt resistors in Joseph The impact on the stability of the Josephson junction caused by the lower part of the forest junction leads to problems such as poor structural performance and stability of the superconducting circuit

Method used

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  • Superconducting circuit structure with step region covered with superconducting cladding layer and preparation method thereof
  • Superconducting circuit structure with step region covered with superconducting cladding layer and preparation method thereof
  • Superconducting circuit structure with step region covered with superconducting cladding layer and preparation method thereof

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Embodiment 1

[0066] see image 3 , the present invention provides a method for preparing a superconducting circuit structure with a step region covered with a superconducting coating layer, the method for preparing a superconducting circuit structure with a step region covered with a superconducting coating layer at least includes the following steps:

[0067] 1) providing a substrate, and sequentially forming a three-layer film structure of a first superconducting material layer, a first insulating material layer and a second superconducting material layer on the surface of the substrate;

[0068] 2) Etching the second superconducting material layer, the first insulating material layer and the first superconducting material layer respectively to form an upper electrode and a lower electrode, the upper electrode and the second electrode located below it An insulating material layer and the lower electrode together form a Josephson junction;

[0069] 3) Forming a second insulating material...

Embodiment 2

[0095] read on Figure 11 and Figure 12 , the present invention also provides a superconducting circuit structure with a step region covered with a superconducting covering layer, the superconducting circuit structure having a step region covered with a superconducting covering layer is obtained by the preparation method described in Embodiment 1 or Embodiment 2 Prepared and obtained, the superconducting circuit structure covered with a superconducting covering layer in the step area includes: a substrate 20; a Josephson junction 21, the Josephson junction 21 is located on the surface of the substrate 20, and the Josephson junction 21 From bottom to top, it includes a lower electrode 214, a first insulating material layer 212 and an upper electrode 215; a second insulating material layer 22, and the second insulating material layer 22 covers the substrate 20 and the first insulating material layer 212 surface, the second insulating material layer 22 is provided with a first ...

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Abstract

The present invention provides a superconducting circuit structure with a step region covered with a superconducting covering layer and a preparation method thereof, comprising: 1) providing a substrate, and sequentially forming a first superconducting material layer, a first insulating material layer and The three-layer film structure of the second superconducting material layer; 2) respectively etching the second superconducting material layer, the first insulating material layer and the first superconducting material layer to form the lower electrode and Josephson junction; 3) in step 2 ) forming a second insulating material layer on the surface of the obtained structure; 4) depositing a shunt resistance material layer, and etching the shunt resistance material layer to form a shunt resistance; 5) depositing a third superconducting material layer, and etching a third The superconducting material layer forms a wiring layer and a superconducting covering layer. The invention can ensure the conduction between the shunt resistance on the surface of the lower electrode and the shunt resistance on the surface of the second insulating material layer, avoid open circuit failure, ensure the stability of the connection of the shunt resistance, and improve the stability of the superconducting circuit structure. work performance.

Description

technical field [0001] The invention relates to the technical field of superconducting circuit design, in particular to a superconducting circuit structure with a step region covered with a superconducting covering layer and a preparation method thereof. Background technique [0002] Superconducting circuit structures include superconducting quantum interference devices (SQUIDs), single flux quantum devices (SFQs) and other circuits using superconducting Josephson junctions. [0003] Superconducting quantum interference device (SQUID) is a superconducting quantum device based on the Josephson effect and flux quantization principles. Its basic structure is to insert two Josephson junctions in a superconducting ring. SQUID is currently The most sensitive magnetic flux detection sensor known, the magnetic flux noise of a typical SQUID device is in μΦ 0 / Hz 1 / 2 magnitude (1Φ 0 =2.07×10 -15 Wb), its magnetic field noise is at fT / Hz 1 / 2 Magnitude (1fT=1×10 -15 T), due to its...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L39/24H01L39/22H01L39/02
CPCH10N60/805H10N60/12H10N60/0912
Inventor 熊伟应利良王会武任洁王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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